Patents by Inventor Suzanne Johanna, Antonetta, COSIJNS

Suzanne Johanna, Antonetta, COSIJNS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ENCODER, POSITION MEASUREMENT SYSTEM AND LITHOGRAPHIC APPARATUS
    Publication number: 20170343390
    Abstract: An encoder includes an optical component and an enclosing device having a first surface portion and a second surface portion. The first surface portion is arranged to receive from an ambient environment a first radiation beam. The second surface portion is arranged to receive from the ambient environment a second radiation beam. The optical component is arranged to combine the first and second radiation beams. The enclosing device is arranged to propagate the first radiation beam along a first path. The first path is between the first surface portion and the optical component. The enclosing device is arranged to propagate the second radiation beam along a second path. The second path is between the second surface portion and the optical component. The enclosing device is arranged to enclose a space, so as to isolate the first path and the second path from the ambient environment.
    Type: Application
    Filed: October 22, 2015
    Publication date: November 30, 2017
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Wouter Onno PRIL, Jan Peter BAARTMAN, Allard Eelco KOOIKER, Suzanne Johanna, Antonetta, COSIJNS, Bryan TONG-MINH