Patents by Inventor Sven Axenbeck

Sven Axenbeck has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7640120
    Abstract: An arc detection means for detecting arcs in a plasma process includes at least one comparator to which an evaluation signal such as an output signal or an internal signal of an AC generator relating to the output signal and a reference value are supplied. The comparator is connected to a logic component that generates a signal for an arc suppression device.
    Type: Grant
    Filed: December 19, 2006
    Date of Patent: December 29, 2009
    Assignee: Huettinger Elektronik GmbH + Co. KG
    Inventors: Sven Axenbeck, Markus Bannwarth, Martin Steuber, Peter Wiedemuth, Lothar Wolf
  • Patent number: 7262606
    Abstract: New methods are used for detecting arcs in a plasma process that is fed by, for example, a freely oscillating AC generator with an output signal of the AC generator for supplying power. The method includes measuring or determining a reference value that is based on a time response of the output signal or of an internal signal of the AC generator relating to the output signal. The methods also include comparing the reference value with a threshold value and detecting an arc when a predetermined result of the comparison is obtained.
    Type: Grant
    Filed: March 24, 2006
    Date of Patent: August 28, 2007
    Assignee: Huettinger Elektronik GmbH + Co. KG
    Inventors: Sven Axenbeck, Markus Bannwarth, Martin Steuber, Alfred Trusch, Lothar Wolf, Peter Wiedemuth, Gerhard Zähringer
  • Publication number: 20070168143
    Abstract: An arc detection means for detecting arcs in a plasma process includes at least one comparator to which an evaluation signal such as an output signal or an internal signal of an AC generator relating to the output signal and a reference value are supplied. The comparator is connected to a logic component that generates a signal for an arc suppression device.
    Type: Application
    Filed: December 19, 2006
    Publication date: July 19, 2007
    Applicant: HUETTINGER ELEKTRONIK GMBH + CO. KG
    Inventors: Sven Axenbeck, Markus Bannwarth, Martin Steuber, Peter Wiedemuth, Lothar Wolf
  • Publication number: 20070045111
    Abstract: A plasma excitation system includes at least one DC current supply connected to a mains supply, at least one medium frequency (MF) unit connected to the at least one DC current supply for generating an AC voltage at its output, and a controller. The output of the MF unit is connected to electrodes of a coating chamber. The controller is connected to the at least one DC current supply for regulating and/or controlling an output value of the DC current supply, and is also connected to the at least one MF unit for regulating and/or controlling an output value of the MF unit. The controller includes at least one input interface for supplying a value describing an output value of the at least one MF unit, and at least one control output interface for connecting a control input of the at least one MF unit.
    Type: Application
    Filed: December 23, 2005
    Publication date: March 1, 2007
    Inventors: Alfred Trusch, Markus Bannwarth, Lothar Wolf, Martin Steuber, Sven Axenbeck, Peter Wiedemuth
  • Publication number: 20060213761
    Abstract: New methods are used for detecting arcs in a plasma process that is fed by, for example, a freely oscillating AC generator with an output signal of the AC generator for supplying power. The method includes measuring or determining a reference value that is based on a time response of the output signal or of an internal signal of the AC generator relating to the output signal. The methods also include comparing the reference value with a threshold value and detecting an arc when a predetermined result of the comparison is obtained.
    Type: Application
    Filed: March 24, 2006
    Publication date: September 28, 2006
    Inventors: Sven Axenbeck, Markus Bannwarth, Martin Steuber, Alfred Trusch, Lothar Wolf, Peter Wiedemuth, Gerhard Zahringer