Patents by Inventor Sven Heiko Grünzig

Sven Heiko Grünzig has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and device for measuring plating ring assembly dimensions
    Patent number: 10145673
    Abstract: A method for obtaining distance measurements for a plating ring assembly and related device are provided. Embodiments include attaching a measurement device to a plating ring assembly, the plating ring assembly including: an outer ring, wherein the measurement device is attached to the outer ring and configured to rotate along the outer ring, a seal extending from a bottom surface of the outer ring along a circumference of the plating ring assembly, contact fingers located along the circumference of the plating ring assembly, between the outer ring and the seal, rotating the measurement device along the circumference of the outer ring by rotating the measurement device or the plating ring assembly; and obtaining critical dimensions of and between the seal and contact fingers with the measurement device.
    Type: Grant
    Filed: December 29, 2017
    Date of Patent: December 4, 2018
    Assignee: GLOBALFOUNDRIES INC.
    Inventor: Sven Heiko Grünzig
  • METHOD AND DEVICE FOR MEASURING PLATING RING ASSEMBLY DIMENSIONS
    Publication number: 20180266807
    Abstract: A method for obtaining distance measurements for a plating ring assembly and related device are provided. Embodiments include attaching a measurement device to a plating ring assembly, the plating ring assembly including: an outer ring, wherein the measurement device is attached to the outer ring and configured to rotate along the outer ring, a seal extending from a bottom surface of the outer ring along a circumference of the plating ring assembly, contact fingers located along the circumference of the plating ring assembly, between the outer ring and the seal, rotating the measurement device along the circumference of the outer ring by rotating the measurement device or the plating ring assembly; and obtaining critical dimensions of and between the seal and contact fingers with the measurement device.
    Type: Application
    Filed: December 29, 2017
    Publication date: September 20, 2018
    Inventor: Sven Heiko GRÜNZIG
  • Method and device for measuring plating ring assembly dimensions
    Patent number: 9891039
    Abstract: A method for obtaining distance measurements for a plating ring assembly and related device are provided. Embodiments include attaching a measurement device to a plating ring assembly, the plating ring assembly including: an outer ring, wherein the measurement device is attached to the outer ring and configured to rotate along the outer ring, a seal extending from a bottom surface of the outer ring along a circumference of the plating ring assembly, contact fingers located along the circumference of the plating ring assembly, between the outer ring and the seal, rotating the measurement device along the circumference of the outer ring by rotating the measurement device or the plating ring assembly; and obtaining critical dimensions of and between the seal and contact fingers with the measurement device.
    Type: Grant
    Filed: March 14, 2017
    Date of Patent: February 13, 2018
    Assignee: GLOBALFOUNDRIES INC.
    Inventor: Sven Heiko Grünzig