Patents by Inventor Sven Jug

Sven Jug has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Selection and use of representative target subsets
    Patent number: 10025756
    Abstract: Methods and respective modules which reduce sample size and measurement duration of metrology parameters by selecting a relatively small subset of measured targets to represent a distribution of parameter measurements of a large number of targets. The subset is selected by sampling a substantially equal number of measurements from each of a selected number of quantiles of the distribution. The methods and modules allow identification of targets which represent correctly the whole target measurement distribution. The methods and modules optimize quantiles and sample size selections, using accuracy scores and estimations of the robustness of the selections. Sampling and selections may be carried out iteratively to reach specified criteria that match the results which can be derived when considering the whole distribution.
    Type: Grant
    Filed: October 7, 2014
    Date of Patent: July 17, 2018
    Assignee: KLA-Tencor Corporation
    Inventors: Dana Klein, Sven Jug
  • SELECTION AND USE OF REPRESENTATIVE TARGET SUBSETS
    Publication number: 20150025846
    Abstract: Methods and respective modules which reduce sample size and measurement duration of metrology parameters by selecting a relatively small subset of measured targets to represent a distribution of parameter measurements of a large number of targets. The subset is selected by sampling a substantially equal number of measurements from each of a selected number of quantiles of the distribution. The methods and modules allow identification of targets which represent correctly the whole target measurement distribution. The methods and modules optimize quantiles and sample size selections, using accuracy scores and estimations of the robustness of the selections. Sampling and selections may be carried out iteratively to reach specified criteria that match the results which can be derived when considering the whole distribution.
    Type: Application
    Filed: October 7, 2014
    Publication date: January 22, 2015
    Inventors: Dana Klein, Sven Jug