Patents by Inventor Svetla Petrova MATOVA

Svetla Petrova MATOVA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Selecting a set of locations associated with a measurement or feature on a substrate
    Patent number: 11681231
    Abstract: A method for selecting an optimal set of locations for a measurement or feature on a substrate, the method includes: defining a first candidate solution of locations, defining a second candidate solution with locations based on modification of a coordinate in a solution domain of the first candidate solution, and selecting the first and/or second candidate solution as the optimal solution according to a constraint associated with the substrate.
    Type: Grant
    Filed: March 4, 2022
    Date of Patent: June 20, 2023
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Pierluigi Frisco, Svetla Petrova Matova, Jochem Sebastiaan Wildenberg
  • SELECTING A SET OF LOCATIONS ASSOCIATED WITH A MEASUREMENT OR FEATURE ON A SUBSTRATE
    Publication number: 20220187714
    Abstract: A method for selecting an optimal set of locations for a measurement or feature on a substrate, the method includes: defining a first candidate solution of locations, defining a second candidate solution with locations based on modification of a coordinate in a solution domain of the first candidate solution, and selecting the first and/or second candidate solution as the optimal solution according to a constraint associated with the substrate.
    Type: Application
    Filed: March 4, 2022
    Publication date: June 16, 2022
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Pierluigi FRISCO, Svetla Petrova MATOVA, Jochem Sebastiaan WILDENBERG
  • Estimating a parameter of a substrate
    Patent number: 11327406
    Abstract: A method for estimating a parameter across a region on a substrate, the region being divided into a plurality of sub-regions, the method including: obtaining values of the parameter for at least two sub-regions out of the plurality of sub-regions; and estimating the parameter for a position on the region by evaluation of a function having said values of the parameter as input values, wherein the function: a) has piecewise defined base functions, wherein a single base function is defined across a sub-region; and b) is continuous between one or more adjacent sub-regions of the at least two sub-regions within the region.
    Type: Grant
    Filed: April 2, 2019
    Date of Patent: May 10, 2022
    Assignee: ASML Netherlands B.V.
    Inventors: Svetla Petrova Matova, Jochem Sebastiaan Wildenberg, Roy Werkman, Luc Roumen
  • Selecting a set of locations associated with a measurement or feature on a substrate
    Patent number: 11294289
    Abstract: A method for selecting an optimal set of locations for a measurement or feature on a substrate, the method includes: defining a first candidate solution of locations, defining a second candidate solution with locations based on modification of a coordinate in a solution domain of the first candidate solution, and selecting the first and/or second candidate solution as the optimal solution according to a constraint associated with the substrate.
    Type: Grant
    Filed: September 21, 2017
    Date of Patent: April 5, 2022
    Assignee: ASML Netherlands B.V.
    Inventors: Pierluigi Frisco, Svetla Petrova Matova, Jochem Sebastiaan Wildenberg
  • ESTIMATING A PARAMETER OF A SUBSTRATE
    Publication number: 20210271171
    Abstract: A method for estimating a parameter across a region on a substrate, the region being divided into a plurality of sub-regions, the method including: obtaining values of the parameter for at least two sub-regions out of the plurality of sub-regions; and estimating the parameter for a position on the region by evaluation of a function having said values of the parameter as input values, wherein the function: a) has piecewise defined base functions, wherein a single base function is defined across a sub-region; and b) is continuous between one or more adjacent sub-regions of the at least two sub-regions within the region.
    Type: Application
    Filed: April 2, 2019
    Publication date: September 2, 2021
    Applicant: ASML Netherlands B.V.
    Inventors: Svetla Petrova MATOVA, Jochem Sebastiaan WILDENBERG, Roy WERKMAN, Luc ROUMEN
  • SELECTING A SET OF LOCATIONS ASSOCIATED WITH A MEASUREMENT OR FEATURE ON A SUBSTRATE
    Publication number: 20190243252
    Abstract: A method for selecting an optimal set of locations for a measurement or feature on a substrate, the method includes: defining a first candidate solution of locations, defining a second candidate solution with locations based on modification of a coordinate in a solution domain of the first candidate solution, and selecting the first and/or second candidate solution as the optimal solution according to a constraint associated with the substrate.
    Type: Application
    Filed: September 21, 2017
    Publication date: August 8, 2019
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Pierluigi FRISCO, Svetla Petrova MATOVA, Jochem Sebastiaan WILDENBERG