Patents by Inventor Svetozar Popovic

Svetozar Popovic has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Radio frequency plasma method for uniform surface processing of RF cavities and other three-dimensional structures
    Patent number: 9852891
    Abstract: A method for efficient plasma etching of surfaces inside three-dimensional structures can include positioning an inner electrode within the chamber cavity; evacuating the chamber cavity; adding a first inert gas to the chamber cavity; regulating the pressure in the chamber; generating a plasma sheath along the inner wall of the chamber cavity; adjusting a positive D.C. bias on the inner electrode to establish an effective plasma sheath voltage; adding a first electronegative gas to the chamber cavity; optionally readjusting the positive D.C. bias on the inner electrode reestablish the effective plasma sheath voltage at the chamber cavity; etching the inner wall of the chamber cavity; and polishing the inner wall to a desired surface roughness.
    Type: Grant
    Filed: April 16, 2015
    Date of Patent: December 26, 2017
    Assignee: Old Dominion University Research Foundation
    Inventors: Svetozar Popovic, Janardan Upadhyay, Leposava Vuskovic, H. Lawrence Phillips, Anne-Marie Valente-Feliciano
  • RADIO FREQUENCY PLASMA METHOD FOR UNIFORM SURFACE PROCESSING OF RF CAVITIES AND OTHER THREE-DIMENSIONAL STRUCTURES
    Publication number: 20170040144
    Abstract: A method for efficient plasma etching of surfaces inside three-dimensional structures can include positioning an inner electrode within the chamber cavity; evacuating the chamber cavity; adding a first inert gas to the chamber cavity; regulating the pressure in the chamber; generating a plasma sheath along the inner wall of the chamber cavity; adjusting a positive D.C. bias on the inner electrode to establish an effective plasma sheath voltage; adding a first electronegative gas to the chamber cavity; optionally readjusting the positive D.C. bias on the inner electrode reestablish the effective plasma sheath voltage at the chamber cavity; etching the inner wall of the chamber cavity; and polishing the inner wall to a desired surface roughness.
    Type: Application
    Filed: April 16, 2015
    Publication date: February 9, 2017
    Applicant: Old Dominion University
    Inventors: Svetozar Popovic, JANARDAN UPADHYAY, LEPOSAVA VUSKOVIC, H. Lawrence Phillips, ANNE-MARIE VALENTE-FELICIANO
  • High-pressure lamp bulb having fill containing multiple excimer combinations
    Patent number: 6133694
    Abstract: A high pressure lamp bulb adapted to simultaneously emit distinct emission spectra of a desired wavelength, the lamp bulb comprising an envelope for containing a fill material under pressure and a fill material, the fill material including a material capable of forming at least two dissimilar excimer species in an amount to provide a total fill pressure no less than about 750 Torr at room temperature.
    Type: Grant
    Filed: May 7, 1999
    Date of Patent: October 17, 2000
    Assignee: Fusion UV Systems, Inc.
    Inventors: Miodrag Cekic, Jerome Frank, Svetozar Popovic
  • Method for remote detection of volatile taggant
    Patent number: 6025200
    Abstract: A method of tagging and detecting objects is disclosed which comprises the steps of: (a) applying a volatile taggant to the object; and (b) subsequently detecting the presence of the taggant by the absorption, transmittance, reflectance, photon emission or fluorescence of the taggant and therefore a proximity of the tagged object. The present invention therefore provides optical sensing means which do not require physical separation of differing compounds for discrimination thereof.
    Type: Grant
    Filed: December 21, 1996
    Date of Patent: February 15, 2000
    Assignee: Tracer Detection Technology Corp.
    Inventors: Norman Kaish, Jay Fraser, Volkan Otugen, Svetozar Popovic