Patents by Inventor Swaminathan Sivakumar

Swaminathan Sivakumar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20250125260
    Abstract: Advanced lithography techniques including sub-10 nm pitch patterning and structures resulting therefrom are described. Self-assembled devices and their methods of fabrication are described.
    Type: Application
    Filed: December 23, 2024
    Publication date: April 17, 2025
    Inventors: Richard E. SCHENKER, Robert L. BRISTOL, Kevin L. LIN, Florian GSTREIN, James M. BLACKWELL, Marie KRYSAK, Manish CHANDHOK, Paul A. NYHUS, Charles H. WALLACE, Curtis W. WARD, Swaminathan SIVAKUMAR, Elliot N. TAN
  • Patent number: 12278204
    Abstract: Techniques are disclosed for realizing a two-dimensional target lithography feature/pattern by decomposing (splitting) it into multiple unidirectional target features that, when aggregated, substantially (e.g., fully) represent the original target feature without leaving an unrepresented remainder (e.g., a whole-number quantity of unidirectional target features). The unidirectional target features may be arbitrarily grouped such that, within a grouping, all unidirectional target features share a common target width value. Where multiple such groupings are provided, individual groupings may or may not have the same common target width value. In some cases, a series of reticles is provided, each reticle having a mask pattern correlating to a grouping of unidirectional target features. Exposure of a photoresist material via the aggregated series of reticles substantially (e.g., fully) produces the original target feature/pattern.
    Type: Grant
    Filed: August 17, 2021
    Date of Patent: April 15, 2025
    Assignee: Intel Corporation
    Inventors: Charles H. Wallace, Hossam A. Abdallah, Elliot N. Tan, Swaminathan Sivakumar, Oleg Golonzka, Robert M. Bigwood
  • Publication number: 20250120152
    Abstract: Gate-all-around integrated circuit structures having oxide sub-fins, and methods of fabricating gate-all-around integrated circuit structures having oxide sub-fins, are described. For example, an integrated circuit structure includes an oxide sub-fin structure having a top and sidewalls. An oxidation catalyst layer is on the top and sidewalls of the oxide sub-fin structure. A vertical arrangement of nanowires is above the oxide sub-fin structure. A gate stack is surrounding the vertical arrangement of nanowires and on at least the portion of the oxidation catalyst layer on the top of the oxide sub-fin structure.
    Type: Application
    Filed: December 18, 2024
    Publication date: April 10, 2025
    Inventors: Leonard P. GULER, Biswajeet GUHA, Tahir GHANI, Swaminathan SIVAKUMAR
  • Patent number: 12218052
    Abstract: Advanced lithography techniques including sub-10 nm pitch patterning and structures resulting therefrom are described. Self-assembled devices and their methods of fabrication are described.
    Type: Grant
    Filed: October 27, 2023
    Date of Patent: February 4, 2025
    Assignee: Intel Corporation
    Inventors: Richard E. Schenker, Robert L Bristol, Kevin L. Lin, Florian Gstrein, James M. Blackwell, Marie Krysak, Manish Chandhok, Paul A Nyhus, Charles H. Wallace, Curtis W. Ward, Swaminathan Sivakumar, Elliot N. Tan
  • Patent number: 12211925
    Abstract: Gate-all-around integrated circuit structures having oxide sub-fins, and methods of fabricating gate-all-around integrated circuit structures having oxide sub-fins, are described. For example, an integrated circuit structure includes an oxide sub-fin structure having a top and sidewalls. An oxidation catalyst layer is on the top and sidewalls of the oxide sub-fin structure. A vertical arrangement of nanowires is above the oxide sub-fin structure. A gate stack is surrounding the vertical arrangement of nanowires and on at least the portion of the oxidation catalyst layer on the top of the oxide sub-fin structure.
    Type: Grant
    Filed: July 10, 2023
    Date of Patent: January 28, 2025
    Inventors: Leonard P. Guler, Biswajeet Guha, Tahir Ghani, Swaminathan Sivakumar
  • Publication number: 20240389300
    Abstract: A three-dimensional memory array may include a first memory array and a second memory array, stacked above the first. Some memory cells of the first array may be coupled to a first layer selector transistor, while some memory cells of the second array may be coupled to a second layer selector transistor. The first and second layer selector transistor may be coupled to one another and to a peripheral circuit that controls operation of the first and/or second memory arrays. A different layer selector transistor may be used for each row of memory cells of a given memory array and/or for each column of memory cells of a given memory array. Such designs may allow increasing density of memory cells in a memory array having a given footprint area, or, conversely, reducing the footprint area of the memory array with a given memory cell density.
    Type: Application
    Filed: July 31, 2024
    Publication date: November 21, 2024
    Applicant: Intel Corporation
    Inventors: Wilfred Gomes, Mauro J. Kobrinsky, Abhishek A. Sharma, Rajesh Kumar, Kinyip Phoa, Elliot Tan, Tahir Ghani, Swaminathan Sivakumar
  • Patent number: 12114479
    Abstract: A three-dimensional memory array may include a first memory array and a second memory array, stacked above the first. Some memory cells of the first array may be coupled to a first layer selector transistor, while some memory cells of the second array may be coupled to a second layer selector transistor. The first and second layer selector transistor may be coupled to one another and to a peripheral circuit that controls operation of the first and/or second memory arrays. A different layer selector transistor may be used for each row of memory cells of a given memory array and/or for each column of memory cells of a given memory array. Such designs may allow increasing density of memory cells in a memory array having a given footprint area, or, conversely, reducing the footprint area of the memory array with a given memory cell density.
    Type: Grant
    Filed: July 6, 2021
    Date of Patent: October 8, 2024
    Assignee: Intel Corporation
    Inventors: Wilfred Gomes, Mauro J. Kobrinsky, Abhishek A. Sharma, Rajesh Kumar, Kinyip Phoa, Elliot Tan, Tahir Ghani, Swaminathan Sivakumar
  • Publication number: 20240282633
    Abstract: Gate aligned contacts and methods of forming gate aligned contacts are described. For example, a method of fabricating a semiconductor structure includes forming a plurality of gate structures above an active region formed above a substrate. The gate structures each include a gate dielectric layer, a gate electrode, and sidewall spacers. A plurality of contact plugs is formed, each contact plug formed directly between the sidewall spacers of two adjacent gate structures of the plurality of gate structures. A plurality of contacts is formed, each contact formed directly between the sidewall spacers of two adjacent gate structures of the plurality of gate structures. The plurality of contacts and the plurality of gate structures are formed subsequent to forming the plurality of contact plugs.
    Type: Application
    Filed: May 2, 2024
    Publication date: August 22, 2024
    Inventors: Oleg GOLONZKA, Swaminathan SIVAKUMAR, Charles H. WALLACE, Tahir GHANI
  • Patent number: 12033894
    Abstract: Gate aligned contacts and methods of forming gate aligned contacts are described. For example, a method of fabricating a semiconductor structure includes forming a plurality of gate structures above an active region formed above a substrate. The gate structures each include a gate dielectric layer, a gate electrode, and sidewall spacers. A plurality of contact plugs is formed, each contact plug formed directly between the sidewall spacers of two adjacent gate structures of the plurality of gate structures. A plurality of contacts is formed, each contact formed directly between the sidewall spacers of two adjacent gate structures of the plurality of gate structures. The plurality of contacts and the plurality of gate structures are formed subsequent to forming the plurality of contact plugs.
    Type: Grant
    Filed: July 13, 2023
    Date of Patent: July 9, 2024
    Assignee: Intel Corporation
    Inventors: Oleg Golonzka, Swaminathan Sivakumar, Charles H. Wallace, Tahir Ghani
  • Patent number: 11972979
    Abstract: Embodiments disclosed herein include semiconductor devices and methods of forming such devices. In an embodiment a semiconductor device comprises a first interlayer dielectric (ILD), a plurality of source/drain (S/D) contacts in the first ILD, a plurality of gate contacts in the first ILD, wherein the gate contacts and the S/D contacts are arranged in an alternating pattern, and wherein top surfaces of the gate contacts are below top surfaces of the S/D contacts so that a channel defined by sidewall surfaces of the first ILD is positioned over each of the gate contacts, mask layer partially filling a first channel over a first gate contact, and a fill metal filling a second channel over a second gate contact that is adjacent to the first gate contact.
    Type: Grant
    Filed: June 7, 2023
    Date of Patent: April 30, 2024
    Assignee: Intel Corporation
    Inventors: Leonard P. Guler, Michael Harper, Suzanne S. Rich, Charles H. Wallace, Curtis Ward, Richard E. Schenker, Paul Nyhus, Mohit K. Haran, Reken Patel, Swaminathan Sivakumar
  • Publication number: 20240088142
    Abstract: Neighboring gate-all-around integrated circuit structures having disjoined epitaxial source or drain regions, and methods of fabricating neighboring gate-all-around integrated circuit structures having disjoined epitaxial source or drain regions, are described. For example, a structure includes first and second vertical arrangements of nanowires, the nanowires of the second vertical arrangement of nanowires having a horizontal width greater than a horizontal width of the nanowires of the first vertical arrangement of nanowires. First and second gate stacks are over the first and second vertical arrangements of nanowires, respectively. First epitaxial source or drain structures are at ends of the first vertical arrangement of nanowires, and second epitaxial source or drain structures are at ends of the second vertical arrangement of nanowires. An intervening dielectric structure is between neighboring ones of the first epitaxial source or drain structures and of the second epitaxial source or drain structures.
    Type: Application
    Filed: November 16, 2023
    Publication date: March 14, 2024
    Inventors: Leonard P. GULER, Biswajeet GUHA, Tahir GHANI, Swaminathan SIVAKUMAR
  • Publication number: 20240071917
    Abstract: Advanced lithography techniques including sub-10 nm pitch patterning and structures resulting therefrom are described. Self-assembled devices and their methods of fabrication are described.
    Type: Application
    Filed: October 27, 2023
    Publication date: February 29, 2024
    Inventors: Richard E. SCHENKER, Robert L. BRISTOL, Kevin L. LIN, Florian GSTREIN, James M. BLACKWELL, Marie KRYSAK, Manish CHANDHOK, Paul A. NYHUS, Charles H. WALLACE, Curtis W. WARD, Swaminathan SIVAKUMAR, Elliot N. TAN
  • Publication number: 20240071955
    Abstract: Described herein is full wafer device that includes a computing logic formed over a substrate and two directional indicators formed in the substrate. The computing logic is arranged as a plurality of dies having a first die edge direction and a second die edge direction perpendicular to the first die edge direction. The computing logic further includes an angled feature extending in a feature direction, the feature direction different from the first die edge direction and the second die edge direction. The first directional indicator formed in the substrate indicates the first die edge direction. The second directional indicator formed in the substrate indicates the feature direction.
    Type: Application
    Filed: August 31, 2022
    Publication date: February 29, 2024
    Applicant: Intel Corporation
    Inventors: Abhishek A. Sharma, Tahir Ghani, Wilfred Gomes, Shem Ogadhoh, Swaminathan Sivakumar, Sagar Suthram, Elliot Tan
  • Patent number: 11862635
    Abstract: Neighboring gate-all-around integrated circuit structures having disjoined epitaxial source or drain regions, and methods of fabricating neighboring gate-all-around integrated circuit structures having disjoined epitaxial source or drain regions, are described. For example, a structure includes first and second vertical arrangements of nanowires, the nanowires of the second vertical arrangement of nanowires having a horizontal width greater than a horizontal width of the nanowires of the first vertical arrangement of nanowires. First and second gate stacks are over the first and second vertical arrangements of nanowires, respectively. First epitaxial source or drain structures are at ends of the first vertical arrangement of nanowires, and second epitaxial source or drain structures are at ends of the second vertical arrangement of nanowires. An intervening dielectric structure is between neighboring ones of the first epitaxial source or drain structures and of the second epitaxial source or drain structures.
    Type: Grant
    Filed: June 22, 2022
    Date of Patent: January 2, 2024
    Assignee: Intel Corporation
    Inventors: Leonard P. Guler, Biswajeet Guha, Tahir Ghani, Swaminathan Sivakumar
  • Publication number: 20230422463
    Abstract: SRAM devices with angled transistors, and related assemblies and methods, are disclosed herein. A transistor is referred to as “angled” if a longitudinal axis of an elongated semiconductor structure (e.g., a fin or a nanoribbon) based on which the transistor is built is at an angle other than 0 degrees or 90 degrees with respect to the edges of front or back faces of a support structure or a die on/in which the transistor resides, e.g., at an angle between about 10 and 80 degrees with respect to at least one of such edges. Implementing at least some of the transistors of SRAM cells as angled transistors may provide a promising way to increasing densities of SRAM cells on the limited real estate of semiconductor chips.
    Type: Application
    Filed: May 5, 2023
    Publication date: December 28, 2023
    Applicant: Intel Corporation
    Inventors: Abhishek A. Sharma, Sagar Suthram, Kimberly L. Pierce, Elliot Tan, Pushkar Sharad Ranade, Shem Odhiambo Ogadhoh, Wilfred Gomes, Anand S. Murthy, Swaminathan Sivakumar, Tahir Ghani
  • Patent number: 11854787
    Abstract: Advanced lithography techniques including sub-10 nm pitch patterning and structures resulting therefrom are described. Self-assembled devices and their methods of fabrication are described.
    Type: Grant
    Filed: May 2, 2022
    Date of Patent: December 26, 2023
    Assignee: Intel Corporation
    Inventors: Richard E. Schenker, Robert L. Bristol, Kevin L. Lin, Florian Gstrein, James M. Blackwell, Marie Krysak, Manish Chandhok, Paul A. Nyhus, Charles H. Wallace, Curtis W. Ward, Swaminathan Sivakumar, Elliot N. Tan
  • Publication number: 20230360972
    Abstract: Gate aligned contacts and methods of forming gate aligned contacts are described. For example, a method of fabricating a semiconductor structure includes forming a plurality of gate structures above an active region formed above a substrate. The gate structures each include a gate dielectric layer, a gate electrode, and sidewall spacers. A plurality of contact plugs is formed, each contact plug formed directly between the sidewall spacers of two adjacent gate structures of the plurality of gate structures. A plurality of contacts is formed, each contact formed directly between the sidewall spacers of two adjacent gate structures of the plurality of gate structures. The plurality of contacts and the plurality of gate structures are formed subsequent to forming the plurality of contact plugs.
    Type: Application
    Filed: July 13, 2023
    Publication date: November 9, 2023
    Inventors: Oleg GOLONZKA, Swaminathan SIVAKUMAR, Charles H. WALLACE, Tahir GHANI
  • Publication number: 20230352561
    Abstract: Gate-all-around integrated circuit structures having oxide sub-fins, and methods of fabricating gate-all-around integrated circuit structures having oxide sub-fins, are described. For example, an integrated circuit structure includes an oxide sub-fin structure having a top and sidewalls. An oxidation catalyst layer is on the top and sidewalls of the oxide sub-fin structure. A vertical arrangement of nanowires is above the oxide sub-fin structure. A gate stack is surrounding the vertical arrangement of nanowires and on at least the portion of the oxidation catalyst layer on the top of the oxide sub-fin structure.
    Type: Application
    Filed: July 10, 2023
    Publication date: November 2, 2023
    Inventors: Leonard P. GULER, Biswajeet GUHA, Tahir GHANI, Swaminathan SIVAKUMAR
  • Publication number: 20230326794
    Abstract: Embodiments disclosed herein include semiconductor devices and methods of forming such devices. In an embodiment a semiconductor device comprises a first interlayer dielectric (ILD), a plurality of source/drain (S/D) contacts in the first ILD, a plurality of gate contacts in the first ILD, wherein the gate contacts and the S/D contacts are arranged in an alternating pattern, and wherein top surfaces of the gate contacts are below top surfaces of the S/D contacts so that a channel defined by sidewall surfaces of the first ILD is positioned over each of the gate contacts, mask layer partially filling a first channel over a first gate contact, and a fill metal filling a second channel over a second gate contact that is adjacent to the first gate contact.
    Type: Application
    Filed: June 7, 2023
    Publication date: October 12, 2023
    Inventors: Leonard P. GULER, Michael HARPER, Suzanne S. RICH, Charles H. WALLACE, Curtis WARD, Richard E. SCHENKER, Paul NYHUS, Mohit K. HARAN, Reken PATEL, Swaminathan SIVAKUMAR
  • Patent number: 11756829
    Abstract: Gate aligned contacts and methods of forming gate aligned contacts are described. For example, a method of fabricating a semiconductor structure includes forming a plurality of gate structures above an active region formed above a substrate. The gate structures each include a gate dielectric layer, a gate electrode, and sidewall spacers. A plurality of contact plugs is formed, each contact plug formed directly between the sidewall spacers of two adjacent gate structures of the plurality of gate structures. A plurality of contacts is formed, each contact formed directly between the sidewall spacers of two adjacent gate structures of the plurality of gate structures. The plurality of contacts and the plurality of gate structures are formed subsequent to forming the plurality of contact plugs.
    Type: Grant
    Filed: October 6, 2022
    Date of Patent: September 12, 2023
    Assignee: Intel Corporation
    Inventors: Oleg Golonzka, Swaminathan Sivakumar, Charles H. Wallace, Tahir Ghani