Patents by Inventor Swapnil A. Lengade
Swapnil A. Lengade has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20250240962Abstract: Some embodiments include an integrated assembly having a vertical stack of alternating insulative levels and conductive levels. The insulative levels have a same primary composition as one another. At least one of the insulative levels is compositionally different relative to others of the insulative levels due to the at least one of the insulative levels including dopant dispersed within the primary composition. An opening extends vertically through the stack. Some embodiments include methods of forming integrated assemblies.Type: ApplicationFiled: April 8, 2025Publication date: July 24, 2025Inventors: Ramey M. Abdelrahaman, Jeslin J. Wu, Chandra Tiwari, Kunal Shrotri, Swapnil A. Lengade
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Publication number: 20240215246Abstract: A method of forming a microelectronic device comprises forming a stack structure comprising a vertically alternating sequence of insulative structures and additional insulative structures, at least some of the additional insulative structures comprising silicon nitride having a ratio of nitrogen atoms to silicon atoms greater than about 1.58:1.00, forming openings through the stack structure, and forming cell pillar structures within the openings, the cell pillar structures individually comprising a semiconductor channel material vertically extending through the stack structure. Related methods, microelectronic devices, memory devices, and electronic systems are also described.Type: ApplicationFiled: March 5, 2024Publication date: June 27, 2024Inventors: Swapnil A. Lengade, Jeremy Adams, Naiming Liu, Jeslin J. Wu, Kadir Abdul, Carlo Mendoza Orofeo
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Publication number: 20240074177Abstract: Microelectronic devices include a region with a tiered stack that includes insulative, conductive, and non-conductive structures arranged in tiers. The insulative structures vertically alternate with both the conductive and the non-conductive structures. Each of the conductive structures is vertically spaced from another of the conductive structures by at least one of the non-conductive structures and at least two of the insulative structures. A composition of the non-conductive structures differs from a composition of the insulative structures. In methods of fabrication, a precursor stack is formed to include the insulative structures vertically alternating with first and second non-conductive structures. In a region of the precursor stack, the first non-conductive structures are removed, forming voids between multi-structure tier groups. Conductive structures are formed in the voids. Electronic systems are also disclosed.Type: ApplicationFiled: August 24, 2022Publication date: February 29, 2024Inventors: David H. Wells, Justin D. Shepherdson, Swapnil A. Lengade, Collin Howder, Dheeraj Kumar, Andrew L. Li
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Patent number: 11152427Abstract: Systems, devices, and methods related to or that employ chalcogenide memory components and compositions are described. A memory device, such as a selector device, may be made of a chalcogenide material composition. A chalcogenide material may have a composition that includes one or more elements from the boron group, such as boron, aluminum, gallium, indium, or thallium. A selector device, for instance, may have a composition of selenium, arsenic, and at least one of boron, aluminum, gallium, indium, or thallium. The selector device may also be composed of germanium or silicon, or both. The relative amount of boron, aluminum, gallium, indium, or thallium may affect a threshold voltage of a memory component, and the relative amount may be selected accordingly. A memory component may, for instance have a composition that includes selenium, arsenic, and some combination of germanium, silicon, and at least one of boron, aluminum, gallium, indium, or thallium.Type: GrantFiled: August 19, 2019Date of Patent: October 19, 2021Assignee: Micron Technology, Inc.Inventors: Paolo Fantini, F. Daniel Gealy, Enrico Varesi, Swapnil A. Lengade
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Patent number: 11114615Abstract: Systems, devices, and methods related to or that employ chalcogenide memory components and compositions are described. A component of a memory cell, such as a selector device, storage device, or self-selecting memory device, may be made of a chalcogenide material composition. A chalcogenide material may have a composition that includes one or more elements from the boron group, such as boron, aluminum, gallium, indium, or thallium. The chalcogenide material, for instance, may have a composition of selenium, germanium, and at least one of boron, aluminum, gallium, indium, or thallium. The chalcogenide material may in some cases also include arsenic, but may in some cases lack arsenic.Type: GrantFiled: June 18, 2020Date of Patent: September 7, 2021Assignee: Micron Technology, Inc.Inventors: Enrico Varesi, Paolo Fantini, Lorenzo Fratin, Swapnil A. Lengade
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Patent number: 11081644Abstract: Apparatuses and methods of manufacture are disclosed for phase change memory cell electrodes having a conductive barrier material. In one example, apparatus includes a first chalcogenide structure and a second chalcogenide structure stacked together with the first chalcogenide structure. A first electrode portion is coupled to the first chalcogenide structure, and a second electrode portion is coupled to the second chalcogenide structure. An electrically conductive barrier material is disposed between the first and second electrode portions.Type: GrantFiled: July 25, 2018Date of Patent: August 3, 2021Assignee: Micron Technology, Inc.Inventors: Swapnil A. Lengade, John M. Meldrim, Andrea Gotti
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Patent number: 10957855Abstract: Apparatuses and methods of manufacture are disclosed for phase change memory cell electrodes having a conductive barrier material. In one example, an apparatus includes a first chalcogenide structure and a second chalcogenide structure stacked together with the first chalcogenide structure. A first electrode portion is coupled to the first chalcogenide structure, and a second electrode portion is coupled to the second chalcogenide structure. An electrically conductive barrier material is disposed between the first and second electrode portions.Type: GrantFiled: July 19, 2018Date of Patent: March 23, 2021Assignee: Micron Technology, Inc.Inventors: Swapnil A. Lengade, John M. Meldrim, Andrea Gotti
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Patent number: 10950791Abstract: Apparatuses and methods of manufacture are disclosed for phase change memory cell electrodes having a conductive barrier material. In one example, an apparatus includes a first chalcogenide structure and a second chalcogenide structure stacked together with the first chalcogenide structure. A first electrode portion is coupled to the first chalcogenide structure, and a second electrode portion is coupled to the second chalcogenide structure. An electrically conductive barrier material is disposed between the first and second electrode portions.Type: GrantFiled: July 19, 2018Date of Patent: March 16, 2021Assignee: Micron Technology, Inc.Inventors: Swapnil A. Lengade, John M. Meldrim, Andrea Gotti
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Publication number: 20200321523Abstract: Systems, devices, and methods related to or that employ chalcogenide memory components and compositions are described. A component of a memory cell, such as a selector device, storage device, or self-selecting memory device, may be made of a chalcogenide material composition. A chalcogenide material may have a composition that includes one or more elements from the boron group, such as boron, aluminum, gallium, indium, or thallium. The chalcogenide material, for instance, may have a composition of selenium, germanium, and at least one of boron, aluminum, gallium, indium, or thallium. The chalcogenide material may in some cases also include arsenic, but may in some cases lack arsenic.Type: ApplicationFiled: June 18, 2020Publication date: October 8, 2020Inventors: Enrico Varesi, Paolo Fantini, Lorenzo Fratin, Swapnil A. Lengade
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Patent number: 10727405Abstract: Systems, devices, and methods related to or that employ chalcogenide memory components and compositions are described. A component of a memory cell, such as a selector device, storage device, or self-selecting memory device, may be made of a chalcogenide material composition. A chalcogenide material may have a composition that includes one or more elements from the boron group, such as boron, aluminum, gallium, indium, or thallium. The chalcogenide material, for instance, may have a composition of selenium, germanium, and at least one of boron, aluminum, gallium, indium, or thallium. The chalcogenide material may in some cases also include arsenic, but may in some cases lack arsenic.Type: GrantFiled: December 20, 2018Date of Patent: July 28, 2020Assignee: Micron Technology, Inc.Inventors: Enrico Varesi, Paolo Fantini, Lorenzo Fratin, Swapnil A. Lengade
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Patent number: 10651381Abstract: Apparatuses and methods of manufacture are disclosed for phase change memory cell electrodes having a conductive barrier material. In one example, an apparatus includes a first chalcogenide structure and a second chalcogenide structure stacked together with the first chalcogenide structure. A first electrode portion is coupled to the first chalcogenide structure, a second electrode portion is coupled to the second chalcogenide structure, and a third electrode portion is between the first and second electrode portions. A first portion of an electrically conductive barrier material is disposed between the first and third electrode portions. A second portion of the electrically conductive barrier material is disposed between the second and third electrode portions.Type: GrantFiled: July 19, 2018Date of Patent: May 12, 2020Assignee: Micron Technology, Inc.Inventors: Swapnil A. Lengade, John M. Meldrim, Andrea Gotti
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Patent number: 10439000Abstract: Systems, devices, and methods related to or that employ chalcogenide memory components and compositions are described. A memory device, such as a selector device, may be made of a chalcogenide material composition. A chalcogenide material may have a composition that includes one or more elements from the boron group, such as boron, aluminum, gallium, indium, or thallium. A selector device, for instance, may have a composition of selenium, arsenic, and at least one of boron, aluminum, gallium, indium, or thallium. The selector device may also be composed of germanium or silicon, or both. The relative amount of boron, aluminum, gallium, indium, or thallium may affect a threshold voltage of a memory component, and the relative amount may be selected accordingly. A memory component may, for instance have a composition that includes selenium, arsenic, and some combination of germanium, silicon, and at least one of boron, aluminum, gallium, indium, or thallium.Type: GrantFiled: November 8, 2018Date of Patent: October 8, 2019Assignee: Micron Technology, Inc.Inventors: Paolo Fantini, F. Daniel Gealy, Enrico Varesi, Swapnil A. Lengade
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Patent number: 10347831Abstract: Doping a storage element, a selector element, or both, of a memory cell with a dopant including one or more of aluminum (Al), zirconium (Zr), hafnium (Hf), and silicon (Si), can minimize volume or density changes in a phase change memory as well as minimize electromigration, in accordance with embodiments. In one embodiment, a memory cell includes a first electrode and a second electrode, and a storage element comprising a layer of doped phase change material between the first and second electrodes, wherein the doped phase change material includes one or more of aluminum, zirconium, hafnium, and silicon. The storage element, a selector element, or both can be doped using techniques such as cosputtering or deposition of alternating layers of a dopant layer and a storage (or selector) material.Type: GrantFiled: June 13, 2018Date of Patent: July 9, 2019Assignee: Intel CorporationInventors: Daniel Gealy, Andrea Gotti, Dale W. Collins, Swapnil A. Lengade
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Publication number: 20190115532Abstract: Systems, devices, and methods related to or that employ chalcogenide memory components and compositions are described. A component of a memory cell, such as a selector device, storage device, or self-selecting memory device, may be made of a chalcogenide material composition. A chalcogenide material may have a composition that includes one or more elements from the boron group, such as boron, aluminum, gallium, indium, or thallium. The chalcogenide material, for instance, may have a composition of selenium, germanium, and at least one of boron, aluminum, gallium, indium, or thallium. The chalcogenide material may in some cases also include arsenic, but may in some cases lack arsenic.Type: ApplicationFiled: December 20, 2018Publication date: April 18, 2019Inventors: Enrico Varesi, Paolo Fantini, Lorenzo Fratin, Swapnil A. Lengade
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Publication number: 20190081103Abstract: Systems, devices, and methods related to or that employ chalcogenide memory components and compositions are described. A memory device, such as a selector device, may be made of a chalcogenide material composition. A chalcogenide material may have a composition that includes one or more elements from the boron group, such as boron, aluminum, gallium, indium, or thallium. A selector device, for instance, may have a composition of selenium, arsenic, and at least one of boron, aluminum, gallium, indium, or thallium. The selector device may also be composed of germanium or silicon, or both. The relative amount of boron, aluminum, gallium, indium, or thallium may affect a threshold voltage of a memory component, and the relative amount may be selected accordingly. A memory component may, for instance have a composition that includes selenium, arsenic, and some combination of germanium, silicon, and at least one of boron, aluminum, gallium, indium, or thallium.Type: ApplicationFiled: November 8, 2018Publication date: March 14, 2019Inventors: Paolo Fantini, F. Daniel Gealy, Enrico Varesi, Swapnil A. Lengade
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Patent number: 10217936Abstract: Apparatuses and methods of manufacture are disclosed for phase change memory cell electrodes having a conductive barrier material. In one example, an apparatus includes a first chalcogenide structure and a second chalcogenide structure stacked together with the first chalcogenide structure. A first electrode portion is coupled to the first chalcogenide structure, and a second electrode portion is coupled to the second chalcogenide structure. An electrically conductive barrier material is disposed between the first and second electrode portions.Type: GrantFiled: July 19, 2018Date of Patent: February 26, 2019Assignee: Micron Technology, Inc.Inventors: Swapnil A. Lengade, John M. Meldrim, Andrea Gotti
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Patent number: 10163977Abstract: Systems, devices, and methods related to or that employ chalcogenide memory components and compositions are described. A memory device, such as a selector device, may be made of a chalcogenide material composition. A chalcogenide material may have a composition that includes one or more elements from the boron group, such as boron, aluminum, gallium, indium, or thallium. A selector device, for instance, may have a composition of selenium, arsenic, and at least one of boron, aluminum, gallium, indium, or thallium. The selector device may also be composed of germanium or silicon, or both. The relative amount of boron, aluminum, gallium, indium, or thallium may affect a threshold voltage of a memory component, and the relative amount may be selected accordingly. A memory component may, for instance have a composition that includes selenium, arsenic, and some combination of germanium, silicon, and at least one of boron, aluminum, gallium, indium, or thallium.Type: GrantFiled: March 22, 2017Date of Patent: December 25, 2018Assignee: MICRON TECHNOLOGY, INC.Inventors: Paolo Fantini, F. Daniel Gealy, Enrico Varesi, Swapnil A. Lengade
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Publication number: 20180351097Abstract: Apparatuses and methods of manufacture are disclosed for phase change memory cell electrodes having a conductive barrier material. In one example, an apparatus includes a first chalcogenide structure and a second chalcogenide structure stacked together with the first chalcogenide structure. A first electrode portion is coupled to the first chalcogenide structure, and a second electrode portion is coupled to the second chalcogenide structure. An electrically conductive barrier material is disposed between the first and second electrode portions.Type: ApplicationFiled: July 19, 2018Publication date: December 6, 2018Applicant: Micron Technology, Inc.Inventors: Swapnil A. Lengade, John M. Meldrim, Andrea Gotti
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Publication number: 20180331285Abstract: Apparatuses and methods of manufacture are disclosed for phase change memory cell electrodes having a conductive barrier material. In one example, an apparatus includes a first chalcogenide structure and a second chalcogenide structure stacked together with the first chalcogenide structure. A first electrode portion is coupled to the first chalcogenide structure, a second electrode portion is coupled to the second chalcogenide structure, and a third electrode portion is between the first and second electrode portions. A first portion of an electrically conductive barrier material is disposed between the first and third electrode portions. A second portion of the electrically conductive barrier material is disposed between the second and third electrode portions.Type: ApplicationFiled: July 19, 2018Publication date: November 15, 2018Inventors: Swapnil A. Lengade, John M. Meldrim, Andrea Gotti
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Publication number: 20180331286Abstract: Apparatuses and methods of manufacture are disclosed for phase change memory cell electrodes having a conductive barrier material. In one example, an apparatus includes a first chalcogenide structure and a second chalcogenide structure stacked together with the first chalcogenide structure. A first electrode portion is coupled to the first chalcogenide structure, and a second electrode portion is coupled to the second chalcogenide structure. An electrically conductive barrier material is disposed between the first and second electrode portions.Type: ApplicationFiled: July 19, 2018Publication date: November 15, 2018Applicant: MICRON TECHNOLOGY, INC.Inventors: Swapnil A. Lengade, JOHN M. MELDRIM, ANDREA GOTTI