Abstract: A hydrogel-driven micropump, comprising: two fluid chambers; a fluid channel, connecting the two fluid chambers; a first substrate plate and a second substrate plate, which are glass wafers produced by micromechanical working, each having accommodation chambers which are filled in hydrogel which are placed next to the two fluid chambers and connected by inward extending bridges, with electric terminals leading to the accommodation chambers; a middle substrate, sandwiched between the first and second substrate plates and made by a bulk micromachining process, having separated accommodation chambers close to ends thereof. A separating block is placed between the accommodation chambers. The middle substrate between the first and second substrate plates forms a micropump body. All of the substrates are separated by membranes. The accommodation chambers for electrophoretic fluid are located between the membranes and the first and second substrate plates, respectively, and insulating material.

Abstract: A high density multi-layer microcoil includes a substrate, a multi-layer coil winding, a magnetic core and a dry film photoresist structure. The multi-layer coil winding and the magnetic core are supported by the dry film photoresist structure. The fabrication process is using photolithography process to form a dry film photoresist structure with a coil tunnel having coil elements perpendicular to the substrate and two outlets at ends of the tunnel; and injecting a conductive material with a low melting point into the tunnel and forming the coil winding.

Abstract: An inkjet print-head architecture, mainly comprises nozzle, heater plates, a chamber and an inlet hole, wherein, the nozzle is arranged inside the chamber for ejecting the ink therefrom, the heater plates are arranged in the chamber for heating the ink in the chamber to be ejected from the nozzle, and the inlet hole is also being arranged in the chamber for enabling the ink to refill the chamber directly through the same and without through a manifold. Since the design of the inlet hole of the present invention provides an one-on-one refill to the chamber thereof, the jetting frequency response of the inkjet printhead is enhanced.

Abstract: A high density multi-layer microcoil includes a substrate, a multi-layer coil winding, a magnetic core and a dry film photoresist structure. The multi-layer coil winding and the magnetic core are supported by the dry film photoresist structure. The fabrication process is using photolithography process to form a dry film photoresist structure with a coil tunnel having coil elements perpendicular to the substrate and two outlets at ends of the tunnel; and injecting a conductive material with a low melting point into the tunnel and forming the coil winding.

Abstract: A thermal bubble membrane actuator for ejecting a liquid which includes a base substrate, a first plurality of heating elements, a first plurality of electrodes, a first plurality of expansion chambers, and elastic membrane sealing the chambers, a liquid flow channel formed in a second thick film photoresist layer, and a top substrate sealing the liquid flow channel having a liquid inlet and a liquid outlet formed therein.

Abstract: A microfluidic component, a method for fabrication thereof and a method for operation thereof provide a laminated assembly of a substrate and a top plate. The substrate and the top plate have defined therebetween a minimum of one collection chamber and a minimum of two connection channels connected to the minimum of one collection chamber. The minimum of two collection channels provides the microfluidic component with enhanced functionality.

Abstract: A high density multi-layer microcoil includes a substrate, a multi-layer coil winding, a magnetic core and a dry film photoresist structure. The multi-layer coil winding and the magnetic core are supported by the dry film photoresist structure. The fabrication process is using photolithography process to form a dry film photoresist structure with a coil tunnel having coil elements perpendicular to the substrate and two outlets at ends of the tunnel; and injecting a conductive material with a low melting point into the tunnel and forming the coil winding.

Abstract: A high density multi-layer microcoil includes a substrate, a multi-layer coil winding, a magnetic core and a dry film photoresist structure. The multi-layer coil winding and the magnetic core are supported by the dry film photoresist structure. The fabrication process is using photolithography process to form a dry film photoresist structure with a coil tunnel having coil elements perpendicular to the substrate and two outlets at ends of the tunnel; and injecting a conductive material with a low melting point into the tunnel and forming the coil winding.

Abstract: A hydrogel-driven micropump, comprising: two fluid chambers; a fluid channel, connecting the two fluid chambers; a first substrate plate and a second substrate plate, which are glass wafers produced by micromechanical working, each having accommodating spaces which are placed next to the two fluid chambers and connected by inward extending bridges, with electric terminals leading to the accommodating spaces; a middle substrate, sandwiched between the first and second substrate plates and made by a bulk micromachining process, having separated accommodating spaces close to ends thereof. A separating block is placed between the accommodating spaces. The middle substrate between the first and second substrate plates forms a micropump body. All of the substrates are separated by membranes. The accommodating spaces for electrophoretic fluid are located between the membranes and the first and second substrate plates, respectively, and insulating material.