Patents by Inventor Swee Hong Choo

Swee Hong Choo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6416909
    Abstract: A new process for fabricating an alternating phase-shifting photomask having an alignment monitor is described. An opaque layer is provided overlying a substrate. The opaque layer is patterned to provide a mask pattern. A phase-shifting pattern is formed on the substrate wherein a portion of the phase-shifting pattern comprises an alignment monitor whereby alignment between the mask pattern and the phase-shifting pattern can be tested.
    Type: Grant
    Filed: July 18, 2000
    Date of Patent: July 9, 2002
    Assignee: Chartered Semiconductor Manufacturing Ltd.
    Inventors: Shyue Fong Quek, Ting Cheong Ang, Swee Hong Choo, Sang Yee Loong