Patents by Inventor Syed Umar Hassan RIZVI

Syed Umar Hassan RIZVI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic method and apparatus
    Patent number: 11036144
    Abstract: A method of determining a configuration of a projection system for a lithographic apparatus as an implementation of a quadratic programming problem with a penalty function. The method includes: receiving dependencies of one or more optical properties of the projection system on a configuration of a plurality of manipulators of the projection system; receiving a plurality of constraints which correspond to physical constraints of the manipulators; finding an initial configuration of the manipulators; and iteratively finding an output configuration of the manipulators. The iteration includes repeating the following steps: determining a set of the plurality of constraints that are violated; determining an updated configuration of the manipulators, the updated configuration of the manipulators being dependent on the set of the plurality of constraints that are violated and a penalty strength; and increasing the penalty strength. These steps are repeated until a convergence criterion is met.
    Type: Grant
    Filed: December 3, 2018
    Date of Patent: June 15, 2021
    Assignee: ASML Netherlands B. V.
    Inventors: Przemyslaw Aleksander Klosiewicz, Bogathi Vishnu Vardhana Reddy, Syed Umar Hassan Rizvi, James Robert Downes
  • LITHOGRAPHIC METHOD AND APPARATUS
    Publication number: 20210011389
    Abstract: A method of determining a configuration of a projection system for a lithographic apparatus as an implementation of a quadratic programming problem with a penalty function. The method includes: receiving dependencies of one or more optical properties of the projection system on a configuration of a plurality of manipulators of the projection system; receiving a plurality of constraints which correspond to physical constraints of the manipulators; finding an initial configuration of the manipulators; and iteratively finding an output configuration of the manipulators. The iteration includes repeating the following steps: determining a set of the plurality of constraints that are violated; determining an updated configuration of the manipulators, the updated configuration of the manipulators being dependent on the set of the plurality of constraints that are violated and a penalty strength; and increasing the penalty strength. These steps are repeated until a convergence criterion is met.
    Type: Application
    Filed: December 3, 2018
    Publication date: January 14, 2021
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Przemyslaw Aleksander KLOSIEWICZ, Bogathi Vishnu Vardhana REDDY, Syed Umar Hassan RIZVI, James Robert DOWNES