Patents by Inventor Syojiro Dohi

Syojiro Dohi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of operating ion source and ion implanting apparatus
    Patent number: 8147705
    Abstract: When an ion beam 4 is to be extracted from an ion source 2 by using a gas containing boron trifluoride as an ion source gas 50 for supplying the gas into a plasma chamber 20 for the ion source 2, a bias voltage VB of a plasma electrode 31 with respect to the plasma chamber 20 for the ion source 2 is set to be positive by a bias circuit 64.
    Type: Grant
    Filed: October 19, 2006
    Date of Patent: April 3, 2012
    Assignee: Nissin Ion Equipment Co., Ltd.
    Inventors: Yutaka Inouchi, Syojiro Dohi, Yasunori Ando, Yasuhiro Matsuda
  • Method of operating ion source and ion implanting apparatus
    Publication number: 20070089833
    Abstract: When an ion beam 4 is to be extracted from an ion source 2 by using a gas containing boron trifluoride as an ion source gas 50 for supplying the gas into a plasma chamber 20 for the ion source 2, a bias voltage VB of a plasma electrode 31 with respect to the plasma chamber 20 for the ion source 2 is set to be positive by a bias circuit 64.
    Type: Application
    Filed: October 19, 2006
    Publication date: April 26, 2007
    Inventors: Yutaka Inouchi, Syojiro Dohi, Yasunori Ando, Yasuhiro Matsuda