Patents by Inventor Syothi Singh

Syothi Singh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Detection of interfaces with atomic resolution during material processing by optical second harmonic generation
    Patent number: 5294289
    Abstract: A technique for observing optical second harmonic generation effect at a surface of a material during processing thereof, particularly in the presence of a plasma, for controlling the processing of the material. A preferred form of the apparatus and method includes a combination of spectral, spatial, polarization and temporal filtering to allow observation of optical second harmonic generation and control of processing of the material with processes such as reactive ion etching to a high degree of resolution.
    Type: Grant
    Filed: January 6, 1993
    Date of Patent: March 15, 1994
    Assignee: International Business Machines Corporation
    Inventors: Tony F. Heinz, Gary S. Selwyn, Syothi Singh, John A. Spinetti, Jr.