Patents by Inventor Syozo Oguri

Syozo Oguri has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Polishing apparatus
    Patent number: 6409576
    Abstract: A polishing apparatus for polishing a surface of a workpiece has a polishing section for polishing a surface of a workpiece, a cleaning section for cleaning a polished surface of the workpiece, a rotating mechanism for rotating the workpiece during cleaning or after cleaning, and a sensor for detecting a reference position of the workpiece. The polishing apparatus further having a controller for controlling the rotating mechanism to stop the workpiece against rotation to align the reference position with a predetermined position based on a detecting signal from the sensor, and a film thickness measuring device for measuring a thickness of a polished surface layer of the aligned workpiece.
    Type: Grant
    Filed: July 26, 2000
    Date of Patent: June 25, 2002
    Assignee: Ebara Corporation
    Inventors: Syozo Oguri, Masafumi Inoue, Saburo Takahashi