Patents by Inventor Syuan-Rong Huang

Syuan-Rong Huang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11404331
    Abstract: A system for determining the cause of an abnormality in a semiconductor manufacturing process includes an abnormality mode determination module, a selection module, and a root cause analysis module. The abnormality mode determination module is used to determine the similarity between wafer bin maps containing the abnormal data. When the similarity among the wafer maps is higher than a reference value, the selection module executes the steps of: determining a bad lot based on the wafer maps where the similarity is higher than the reference value; determining a time span within which the bad lot is generated; selecting other bad lots occurring in the time span and satisfying a failure model; selecting a good lot based on a fixed lot interval. The root cause analysis module is used to execute the steps of calculating the correlation among data to obtain confidence indexes.
    Type: Grant
    Filed: June 29, 2020
    Date of Patent: August 2, 2022
    Assignee: Vanguard International Semiconductor Corporation
    Inventors: Syuan-Rong Huang, Chien-Huei Yang, Chun-Fu Tung, Hua-Ming Wang, Yung-Cheng Chang
  • Publication number: 20210407866
    Abstract: A system for determining the cause of an abnormality in a semiconductor manufacturing process includes an abnormality mode determination module, a selection module, and a root cause analysis module. The abnormality mode determination module is used to determine the similarity between wafer bin maps containing the abnormal data. When the similarity among the wafer maps is higher than a reference value, the selection module executes the steps of: determining a bad lot based on the wafer maps where the similarity is higher than the reference value; determining a time span within which the bad lot is generated; selecting other bad lots occurring in the time span and satisfying a failure model; selecting a good lot based on a fixed lot interval. The root cause analysis module is used to execute the steps of calculating the correlation among data to obtain confidence indexes.
    Type: Application
    Filed: June 29, 2020
    Publication date: December 30, 2021
    Inventors: Syuan-Rong Huang, Chien-Huei Yang, Chun-Fu Tung, Hua-Ming Wang, Yung-Cheng Chang