Patents by Inventor Syuichi Nogawa

Syuichi Nogawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Film forming apparatus
    Patent number: 5674368
    Abstract: A film forming apparatus includes a film forming chamber in which a film is formed on a substrate at a film forming position, a plurality of load lock chambers provided on the film forming chamber through gate valves respectively, a plurality of pivots provided in the film forming chamber correspondingly to the respective load lock chambers, and carrying arms supported by the pivots respectively so as to move the substrate from any one of the load lock chambers to the film forming position and contrariwise from the film forming position to any one of the load lock chambers.
    Type: Grant
    Filed: May 27, 1994
    Date of Patent: October 7, 1997
    Assignee: Nissin Electric Co., Ltd.
    Inventors: Hajime Hashimoto, Kazuo Kubota, Daisuke Inoue, Syuichi Nogawa
  • Film forming apparatus
    Patent number: 5482607
    Abstract: A film forming apparatus includes a film forming chamber in which a film is formed on a substrate at a film forming position, a plurality of load lock chambers provided on the film forming chamber through gate valves respectively, a plurality of pivots provided in the film forming chamber correspondingly to the respective load lock chambers, and carrying arms supported by the pivots respectively so as to move the substrate from any one of the load lock chambers to the film forming position and contrariwise from the film forming position to any one of the load lock chambers.
    Type: Grant
    Filed: September 20, 1993
    Date of Patent: January 9, 1996
    Assignee: Nissin Electric Co., Ltd.
    Inventors: Hajime Hashimoto, Kazuo Kubota, Daisuke Inoue, Syuichi Nogawa