Patents by Inventor Syuichi Yabu

Syuichi Yabu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Exposure apparatus
    Patent number: 4583840
    Abstract: An exposure apparatus includes an original stage for holding an original, a stage holding and moving a radiation sensitive member, a projection optical system for projecting the image of the original onto the radiation sensitive member, a device for illuminating the original, and a device for supplying heat to the projection optical system to maintain the imaging position of the projection optical system when no exposure operation is effected.
    Type: Grant
    Filed: November 18, 1983
    Date of Patent: April 22, 1986
    Assignee: Canon Kabushiki Kaisha
    Inventors: Syuichi Yabu, Hiroshi Sato