Patents by Inventor Syujiro Oka

Syujiro Oka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sheet processing method
    Patent number: 6187060
    Abstract: A processing apparatus of the invention includes a rotary processing part for rotating and drying plural sheets of objects to be processed collectively in order to allow the object to be rotated immediately after they are accommodated in the rotary processing part and a balance adjusting mechanism for adjusting balance of the rotary processing part by moving counterweights in accordance with the number of the objects. Further the processing apparatus further includes a counter for counting the number of the objects accommodated in the rotary processing part and a control unit for controlling the balance adjusting operation of the balance adjusting mechanism in accordance with a predetermined relationship between the number of objects and the respective positions of the counterweights.
    Type: Grant
    Filed: September 17, 1998
    Date of Patent: February 13, 2001
    Assignees: Tokyo Electron Limited, Ohmiya Ind. Co., Ltd.
    Inventors: Tatsuya Nishida, Kenji Miyachi, Syujiro Oka
  • Processing apparatus of processing wafer sheets
    Patent number: 5960562
    Abstract: A processing apparatus of the invention includes a rotary processing part for rotating and drying plural sheets of objects to be processed collectively in order to allow the object to be rotated immediately after they are accommodated in the rotary processing part and a balance adjusting mechanism for adjusting balance of the rotary processing part by moving counterweights in accordance with the number of the objects. Further the processing apparatus further includes a counter for counting the number of the objects accommodated in the rotary processing part and a control unit for controlling the balance adjusting operation of the balance adjusting mechanism in accordance with a predetermined relationship between the number of objects and the respective positions of the counterweights.
    Type: Grant
    Filed: June 17, 1997
    Date of Patent: October 5, 1999
    Assignee: Tokyo Electron, Ltd.
    Inventors: Tatsuya Nishida, Kenji Miyachi, Syujiro Oka