Patents by Inventor Syunpei Yoshikawa

Syunpei Yoshikawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9823197
    Abstract: A detecting method includes irradiating a substrate having a concave and convex shape, with laser light collected by a lens; and detecting a height difference of the concave and convex shape by acquiring light intensity of reflected light and/or scattered light from the substrate as image data, and a light irradiation surface of the substrate is arranged at a position closer to the lens than a focal position of the lens is, reflected light and/or scattered light from the light irradiation surface is received as detected light, and a height difference of the substrate is detected based on a change in intensity of the received light.
    Type: Grant
    Filed: October 4, 2013
    Date of Patent: November 21, 2017
    Assignee: Toray Industries, Inc.
    Inventors: Kunihisa Nagino, Syunpei Yoshikawa
  • Publication number: 20150276604
    Abstract: A detecting method includes irradiating a substrate having a concave and convex shape, with laser light collected by a lens; and detecting a height difference of the concave and convex shape by acquiring light intensity of reflected light and/or scattered light from the substrate as image data, and a light irradiation surface of the substrate is arranged at a position closer to the lens than a focal position of the lens is, reflected light and/or scattered light from the light irradiation surface is received as detected light, and a height difference of the substrate is detected based on a change in intensity of the received light.
    Type: Application
    Filed: October 4, 2013
    Publication date: October 1, 2015
    Inventors: Kunihisa Nagino, Syunpei Yoshikawa