Patents by Inventor Syunsuke Toyoizumi

Syunsuke Toyoizumi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Particle capture unit, method for manufacturing the same, and substrate processing apparatus
    Patent number: 8821607
    Abstract: A particle capture unit adopted to be exposed to a space in which particles fly includes at least a first layer formed of a plurality of first fiber-like materials and a second layer formed of a plurality of second fiber-like materials. The first fiber-like materials are thinner than the second fiber-like materials and arrangement density of the first fiber-like materials in the first layer is higher than that of the second fiber-like materials in the second layer, the second layer is interposed between the first layer and the space, and the first and second layers are hardened and bonded together by sintering.
    Type: Grant
    Filed: March 23, 2012
    Date of Patent: September 2, 2014
    Assignee: Tokyo Electron Limited
    Inventors: Tsuyoshi Moriya, Syunsuke Toyoizumi, Katsuyuki Takahiro
  • PARTICLE CAPTURE UNIT, METHOD FOR MANUFACTURING THE SAME, AND SUBSTRATE PROCESSING APPARATUS
    Publication number: 20120240533
    Abstract: A particle capture unit adopted to be exposed to a space in which particles fly includes at least a first layer formed of a plurality of first fiber-like materials and a second layer formed of a plurality of second fiber-like materials. The first fiber-like materials are thinner than the second fiber-like materials and arrangement density of the first fiber-like materials in the first layer is higher than that of the second fiber-like materials in the second layer, the second layer is interposed between the first layer and the space, and the first and second layers are hardened and bonded together by sintering.
    Type: Application
    Filed: March 23, 2012
    Publication date: September 27, 2012
    Applicant: Tokyo Electron Limited
    Inventors: Tsuyoshi Moriya, Syunsuke Toyoizumi, Katsuyuki Takahiro