Patents by Inventor Syusaku Yanagawa

Syusaku Yanagawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate temperature measuring apparatus, substrate temperature measuring method, substrate heating method and heat treatment apparatus
    Patent number: 6311016
    Abstract: A temperature measuring apparatus, for measuring a temperature of a substrate in a heating apparatus heating a substrate by irradiation of light, and a method for measuring a substrate temperature, the measuring apparatus having a thermocouple and a covering member for covering it. The covering member portion covering the thermocouple is made of a material with a high heat conductivity and its excluding the material with a high heat conductivity portion is made of a material with a high light reflection factor respectively, whereby it is possible to accurately measure the temperature of the substrate heated by irradiation light without the measurement being affected by the heating irradiation light and without contaminating the substrate and further, without depending on film thicknesses structure of the substrate.
    Type: Grant
    Filed: May 7, 1999
    Date of Patent: October 30, 2001
    Assignee: Sony Corporation
    Inventors: Syusaku Yanagawa, Werner Blersch