Abstract: The present disclosure relates to a gas sensor including a first layer and a second layer superimposed on each other along an interface between the two layers. The first layer includes an array of nanoparticles along the interface, the nanoparticles provided so as to allow, upon illumination with electromagnetic radiation, long range diffractive coupling of surface plasmon resonances resulting in a surface lattice resonance condition. The second layer includes a material that, when exposed to at least one predetermined gas, detectably affects the surface lattice resonance condition. The material of the second layer preferably has a porosity of at least 10%.

Abstract: Micromachined reference electrodes for use in miniaturized electrochemical sensors, and methods for fabricating such reference electrodes and electrochemical sensors, for example, as a part of a microfluidic system, are disclosed. Electrochemical measurements allow for inexpensive detection of a wide variety of (bio-)chemical compounds in solution. The reference electrode is one of the main parts of an electrochemical cell. The reference electrode, from which no current is drawn, has a stable, constant potential.

Abstract: A microresonator for use as a resonator in a detector is disclosed. In one aspect, the microresonator has a first predetermined resonance mode. The microresonator has an integrated electronic transducer for measuring deformation of the microresonator in the first predetermined resonance mode of the microresonator. The transducer is located at a local deformation of the predetermined resonance mode to measure the deformation of the microresonator at such location. The first predetermined resonance mode may be one of higher order resonance modes.

Abstract: The present disclosure relates to a gas sensor including a first layer and a second layer superimposed on each other along an interface between the two layers. The first layer includes an array of nanoparticles along the interface, the nanoparticles provided so as to allow, upon illumination with electromagnetic radiation, long range diffractive coupling of surface plasmon resonances resulting in a surface lattice resonance condition. The second layer includes a material that, when exposed to at least one predetermined gas, detectably affects the surface lattice resonance condition. The material of the second layer preferably has a porosity of at least 10%.

Abstract: Micromachined reference electrodes for use in miniaturized electrochemical sensors, and methods for fabricating such reference electrodes and electrochemical sensors, for example, as a part of a microfluidic system, are disclosed. Electrochemical measurements allow for inexpensive detection of a wide variety of (bio-)chemical compounds in solution. The reference electrode is one of the main parts of an electrochemical cell. The reference electrode, from which no current is drawn, has a stable, constant potential.

Abstract: A sensor device is provided for determining the presence and/or amount of at least one component in a fluid. The sensor device comprises at least one sensor unit, the at least one sensor unit comprising at least one elongated nanostructure and a dielectric material surrounding the at least one elongated nanostructure. The dielectric material is such that it is selectively permeable for one of the at least one component and is capable of sensing the component permeated through the dielectric material. The sensor device according to preferred embodiments shows good sensitivity and good mechanical strength. The present invention furthermore provides a method for manufacturing such a sensor device and a method for determining the presence and/or amount of at least one component in a fluid using such a sensor device.

Abstract: An analyte sensing device is disclosed. In one aspect, the device includes at least one sensing module on a substrate. The sensing module has at least one nanowire including a bottom, an intermediate part and a top, the bottom being closer to the substrate than the top. The module has a surrounding electrode surrounding the bottom and at least part of the intermediate part of each nanowire in height direction and being electrically isolated from the nanowire. There is a gap between each nanowire and the corresponding surrounding electrode allowing penetration of an analyte to be detected between the nanowire and the surrounding electrode. A measurement circuitry is electrically connected to each nanowire and the surrounding electrode for detecting a change in an electrical property as a result of the penetration of the analyte into the gap.

Abstract: The present invention relates to a method for obtaining enlarged Cu grains in small trenches. More specifically it related to a method for creating enlarged copper grains or inducing super secondary grain growth in electrochemically deposited copper in narrow trenches and/or vias to be used in semiconductor devices.

Abstract: A sensor device is provided for determining the presence and/or amount of at least one component in a fluid. The sensor device comprises at least one sensor unit, the at least one sensor unit comprising at least one elongated nanostructure and a dielectric material surrounding the at least one elongated nanostructure. The dielectric material is such that it is selectively permeable for one of the at least one component and is capable of sensing the component permeated through the dielectric material. The sensor device according to preferred embodiments shows good sensitivity and good mechanical strength. The present invention furthermore provides a method for manufacturing such a sensor device and a method for determining the presence and/or amount of at least one component in a fluid using such a sensor device.

Abstract: The present invention relates to a method for obtaining enlarged Cu grains in small trenches. More specifically it related to a method for creating enlarged copper grains or inducing super secondary grain growth in electrochemically deposited copper in narrow trenches and/or vias to be used in semiconductor devices.

Abstract: The present invention is related to a method for depositing a metal-containing film from a metal plating bath, comprising the steps of subsequently depositing a metal-containing layer from a metal plating bath followed by a heating step and/or a vacuum step, said subsequent steps being repeated for a number of times in different sequences.