Patents by Inventor Szu-Hua Chen

Szu-Hua Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240072115
    Abstract: A device includes: a complementary transistor including: a first transistor having a first source/drain region and a second source/drain region; and a second transistor stacked on the first transistor, and having a third source/drain region and a fourth source/drain region, the third source/drain region overlapping the first source/drain region, the fourth source/drain region overlapping the second source/drain region. The device further includes: a first source/drain contact electrically coupled to the third source/drain region; a second source/drain contact electrically coupled to the second source/drain region; a gate isolation structure adjacent the first and second transistors; and an interconnect structure electrically coupled to the first source/drain contact and the second source/drain contact.
    Type: Application
    Filed: February 13, 2023
    Publication date: February 29, 2024
    Inventors: Wei-Xiang You, Wei-De Ho, Hsin Yang Hung, Meng-Yu Lin, Hsiang-Hung Huang, Chun-Fu Cheng, Kuan-Kan Hu, Szu-Hua Chen, Ting-Yun Wu, Wei-Cheng Tzeng, Wei-Cheng Lin, Cheng-Yin Wang, Jui-Chien Huang, Szuya Liao
  • Publication number: 20240047523
    Abstract: A method for forming a semiconductor device structure is provided. The method includes forming a gate stack over a substrate. The method includes forming a spacer over first sidewalls of the gate stack using a first precursor. The first precursor includes a first boron- and nitrogen-containing material having a first hexagonal ring structure, the spacer has a plurality of first layers, and each first layer includes boron and nitrogen.
    Type: Application
    Filed: August 4, 2022
    Publication date: February 8, 2024
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Cheng-Ming LIN, Szu-Hua CHEN, Wei-Yen WOON, Szuya LIAO
  • Publication number: 20240030281
    Abstract: A semiconductor device having a low-k isolation structure and a method for forming the same are provided. The semiconductor device includes channel structures, laterally extending on a substrate; gate structures, intersecting and covering the channel structures; and a channel isolation structure, laterally penetrating through at least one of the channel structures, and extending between separate sections of one of the gate structures along an extending direction of the one of the gate structures. A low-k dielectric material in the channel isolation structure comprises boron nitride.
    Type: Application
    Filed: July 21, 2022
    Publication date: January 25, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Szu-Hua Chen, Cheng-Ming Lin, Han-Yu Lin, Wei-Yen Woon, Ming-Jie Huang, Ting-Gang Chen, Tai-Chun Huang, Ming-Chang Wen, Szuya Liao
  • Publication number: 20230402386
    Abstract: A semiconductor device includes a substrate and an interconnection layer disposed on the substrate. The interconnection layer includes a plurality of etch-stop layers, a plurality of first dielectric layers, and a plurality of conductive layers. The first dielectric layers are disposed on the plurality of etch-stop layers, wherein the plurality of first dielectric layers comprises porous organic framework (POF) dielectrics having a dielectric constant of 2 or less, and a thermal conductivity of 1 W/(m·K) or more. The conductive layers are embedded in the first dielectric layers.
    Type: Application
    Filed: June 13, 2022
    Publication date: December 14, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Szu-Hua Chen, Wei-Yen Woon, Szuya Liao
  • Publication number: 20230402528
    Abstract: Semiconductor structures and methods of forming the same are provided. In an embodiment, an exemplary method includes forming a dummy gate stack engaging a semiconductor fin over a substrate, conformally depositing a first dielectric layer over the substrate, conformally depositing a second dielectric layer over the first dielectric layer, etching back the first dielectric layer and the second dielectric layer to form a gate spacer extending along a sidewall surface of the dummy gate stack, the gate spacer comprising the first dielectric layer and the second dielectric layer, forming source/drain features in and over the semiconductor fin and adjacent the dummy gate stack, and replacing the dummy gate stack with a gate structure, where a dielectric constant of the first dielectric layer is less than a dielectric constant of silicon oxide, and the second dielectric layer is less easily to be oxidized than the first dielectric layer.
    Type: Application
    Filed: March 2, 2023
    Publication date: December 14, 2023
    Inventors: Szu-Hua Chen, Cheng-Ming Lin, Wei-Xiang You, Wei-De Ho, Wei-Yen Woon, Szuya Liao
  • Publication number: 20230268386
    Abstract: A device includes a first semiconductor structure, a second semiconductor structure, and an isolation structure which is disposed between the first and second semiconductor structures, and which includes a dielectric material having a dielectric constant higher than 8 and lower than 16. A method for manufacturing the device is also disclosed.
    Type: Application
    Filed: February 23, 2022
    Publication date: August 24, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Han-Yu LIN, Che-Chi SHIH, Szu-Hua CHEN, Kuan-Da HUANG, Cheng-Ming LIN, Tze-Chung LIN, Li-Te LIN, Wei-Yen WOON, Pinyen LIN
  • Publication number: 20230020731
    Abstract: The present disclosure describes a semiconductor device with a rare earth metal oxide layer and a method for forming the same. The method includes forming fin structures on a substrate and forming superlattice structures on the fin structures, where each of the superlattice structures includes a first-type nanostructured layer and a second-type nanostructured layer. The method further includes forming an isolation layer between the superlattice structures, implanting a rare earth metal into a top portion of the isolation layer to form a rare earth metal oxide layer, and forming a polysilicon structure over the superlattice structures. The method further includes etching portions of the superlattice structures adjacent to the polysilicon structure to form a source/drain (S/D) opening and forming an S/D region in the S/D opening.
    Type: Application
    Filed: November 23, 2021
    Publication date: January 19, 2023
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Han-Yu Lin, Szu-Hua Chen, Kuan-Kan Hu, Kenichi Sano, Po-Cheng Wang, Wei-Yen Woon, Pinyen Lin, Che Chi Shih
  • Publication number: 20220310800
    Abstract: The present disclosure describes a semiconductor device and a method for forming the semiconductor device. The method includes forming a fin structure on a substrate, forming a gate structure on the fin structure, and forming a source/drain (S/D) region on the fin structure not covered by the gate structure. The method further includes forming a contact structure on the S/D region. Forming the contact structure includes forming a transition metal chalcogenide (TMC) layer on the S/D region, and forming a contact plug on the TMC layer.
    Type: Application
    Filed: November 23, 2021
    Publication date: September 29, 2022
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Mrunal Abhijith Khaderbad, Wei-Yen WOON, Cheng-Ming LIN, Han-Yu LIN, Szu-Hua CHEN
  • Publication number: 20220285221
    Abstract: The present disclosure provides low resistance contacts and damascene interconnects with one or more graphene layers in fin structures of FETs. An example semiconductor device can include a substrate with a fin structure that includes an epitaxial region. The semiconductor device can also include an etch stop layer on the epitaxial region, and an interlayer dielectric layer on the etch stop layer. The semiconductor device can further include a metal contact, above the epitaxial region, formed through the etch stop layer and the interlayer dielectric layer, and a graphene film at interfaces between the metal contact and each of the epitaxial region, the etch stop layer, and the interlayer dielectric layer.
    Type: Application
    Filed: December 14, 2021
    Publication date: September 8, 2022
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Mrunal Abhijith Khaderbad, Wei-Yen Woon, Cheng-Ming Lin, Han-Yu Lin, Szu-Hua Chen, Jhih-Rong Huang, Tzer-Min Shen
  • Publication number: 20060146016
    Abstract: The present invention relates to one method of zooming in a displayed image to be used in a portable electronic device. The method comprises: displaying an original image; determining whether or not to switch to a zooming in mode; selecting a zooming in ratio; in accordance with the zooming in ratio, processing the zoom in of the original image to produce a zoomed in image; and displaying the zoomed in image corresponding to the size of the display screen, and in accordance with one control signal to change the zoomed in image displayed by the display screen.
    Type: Application
    Filed: June 21, 2005
    Publication date: July 6, 2006
    Applicant: Tatung Co., Ltd.
    Inventors: Chieh-Yu Chan, Szu-Hua Chen, Yueh-Chi Wang, Yi-Ru Chen