Patents by Inventor Szu-Yao Chang

Szu-Yao Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240023322
    Abstract: The present application provides a memory device having a word line (WL) surrounding a gate structure and a manufacturing method of the memory device. The memory device includes a first dielectric surrounding a capacitor; a second dielectric disposed over the first dielectric and the capacitor; a word line embedded in the second dielectric; and a gate structure disposed over the capacitor and extending through the second dielectric, wherein the gate structure is at least partially surrounded by the word line.
    Type: Application
    Filed: July 5, 2023
    Publication date: January 18, 2024
    Inventor: SZU-YAO CHANG
  • Publication number: 20240023316
    Abstract: A semiconductor structure and a method of manufacturing a semiconductor structure are provided. The semiconductor structure includes a substrate, an upper structure, a vertical transistor an electrical pad. The upper structure is disposed on the substrate and defines a hole. The vertical transistor is disposed in the hole. The electrical pad is disposed in the hole and on the vertical transistor. A top surface of the electrical pad is substantially aligned with a topmost surface of the upper structure.
    Type: Application
    Filed: July 5, 2023
    Publication date: January 18, 2024
    Inventor: SZU-YAO CHANG
  • Publication number: 20240023321
    Abstract: The present application provides a memory device having a word line (WL) surrounding a gate structure and a manufacturing method of the memory device. The memory device includes a first dielectric surrounding a capacitor; a second dielectric disposed over the first dielectric and the capacitor; a word line embedded in the second dielectric; and a gate structure disposed over the capacitor and extending through the second dielectric, wherein the gate structure is at least partially surrounded by the word line.
    Type: Application
    Filed: July 12, 2022
    Publication date: January 18, 2024
    Inventor: Szu-Yao Chang
  • Publication number: 20240023315
    Abstract: A semiconductor structure and a method of manufacturing a semiconductor structure are provided. The semiconductor structure includes a substrate, an upper structure, a vertical transistor an electrical pad. The upper structure is disposed on the substrate and defines a hole. The vertical transistor is disposed in the hole. The electrical pad is disposed in the hole and on the vertical transistor. A top surface of the electrical pad is substantially aligned with a topmost surface of the upper structure.
    Type: Application
    Filed: July 12, 2022
    Publication date: January 18, 2024
    Inventor: SZU-YAO CHANG
  • Publication number: 20230284431
    Abstract: A semiconductor device structure and method for manufacturing the same are provided. The method includes: providing a substrate; forming a first word line and a second word line extending along a first direction; forming a dielectric material conformally on a first sidewall of the first word line and on a second sidewall of the second word line, wherein the second sidewall of the second word line faces the first sidewall of the first word line; forming a semiconductor material on a sidewall of the dielectric material; and patterning the dielectric material and the semiconductor material to form a gate dielectric structure and a channel layer between the first word line and the second word line.
    Type: Application
    Filed: March 4, 2022
    Publication date: September 7, 2023
    Inventors: SZU-YAO CHANG, CHUNG-LIN HUANG
  • Publication number: 20230284435
    Abstract: A semiconductor device structure and method for manufacturing the same are provided. The semiconductor device structure includes a first word line, a second word line, a gate dielectric structure, a channel layer, and a bit line. The first word line and second word line extend along a first direction. The gate dielectric structure is disposed on a first sidewall of the first word line and on a second sidewall of the second word line. The channel layer is disposed on a first sidewall of the gate dielectric structure. The bit line is disposed on the channel layer and extends along a second direction substantially perpendicular to the first direction. A first roughness of a first sidewall of the channel is different from a second roughness of a second sidewall of the channel layer.
    Type: Application
    Filed: March 4, 2022
    Publication date: September 7, 2023
    Inventors: SZU-YAO CHANG, CHUNG-LIN HUANG
  • Patent number: 11641734
    Abstract: A method of forming a semiconductor structure includes forming a capacitor on a substrate. A recess is formed in the capacitor. A drain region is formed in the recess. A word line is formed on the drain region. A gate structure is formed on the drain region, and the gate structure is electrically connected to the word line. A first bit line is formed on the gate structure, such that the first bit line servers as a source region.
    Type: Grant
    Filed: April 18, 2022
    Date of Patent: May 2, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Szu-Yao Chang
  • Patent number: 11574911
    Abstract: The present application discloses a method for fabricating a semiconductor device with a protruding contact. The method includes providing a substrate; forming a bit line structure on the substrate; forming a capacitor contact structure next to the bit line structure; recessing a top surface of the bit line structure; and forming a landing pad layer covering a portion of a top surface of the capacitor contact structure and an upper portion of a sidewall of the capacitor contact structure.
    Type: Grant
    Filed: December 7, 2021
    Date of Patent: February 7, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventors: Chiang-Lin Shih, Chih-Hung Chen, Szu-Yao Chang
  • Patent number: 11469231
    Abstract: The present application discloses a semiconductor device with a protruding contact and a method for fabricating the semiconductor device with the protruding contact. The semiconductor device includes a substrate, a capacitor contact structure protruding from the substrate, and a landing pad layer covering a portion of a top surface of the capacitor contact structure and an upper portion of a sidewall of the capacitor contact structure.
    Type: Grant
    Filed: October 15, 2020
    Date of Patent: October 11, 2022
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventors: Chiang-Lin Shih, Chih-Hung Chen, Szu-Yao Chang
  • Publication number: 20220238530
    Abstract: A method of forming a semiconductor structure includes forming a capacitor on a substrate. A recess is formed in the capacitor. A drain region is formed in the recess. A word line is formed on the drain region. A gate structure is formed on the drain region, and the gate structure is electrically connected to the word line. A first bit line is formed on the gate structure, such that the first bit line servers as a source region.
    Type: Application
    Filed: April 18, 2022
    Publication date: July 28, 2022
    Inventor: Szu-Yao CHANG
  • Patent number: 11342335
    Abstract: A semiconductor structure includes a substrate, a drain region, a word line, a gate structure, and a first bit line. The drain region is disposed on the substrate. The gate structure is disposed on the drain region and has a portion in the word line. The first bit line is disposed on the gate structure to serve as a source region.
    Type: Grant
    Filed: November 5, 2019
    Date of Patent: May 24, 2022
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Szu-Yao Chang
  • Publication number: 20220122982
    Abstract: The present application discloses a method for fabricating a semiconductor device with a protruding contact. The method includes providing a substrate; forming a bit line structure on the substrate; forming a capacitor contact structure next to the bit line structure; recessing a top surface of the bit line structure; and forming a landing pad layer covering a portion of a top surface of the capacitor contact structure and an upper portion of a sidewall of the capacitor contact structure.
    Type: Application
    Filed: December 7, 2021
    Publication date: April 21, 2022
    Inventors: CHIANG-LIN SHIH, CHIH-HUNG CHEN, SZU-YAO CHANG
  • Publication number: 20220122979
    Abstract: The present application discloses a semiconductor device with a protruding contact and a method for fabricating the semiconductor device with the protruding contact. The semiconductor device includes a substrate, a capacitor contact structure protruding from the substrate, and a landing pad layer covering a portion of a top surface of the capacitor contact structure and an upper portion of a sidewall of the capacitor contact structure.
    Type: Application
    Filed: October 15, 2020
    Publication date: April 21, 2022
    Inventors: CHIANG-LIN SHIH, CHIH-HUNG CHEN, SZU-YAO CHANG
  • Patent number: 11264389
    Abstract: The stack capacitor structure includes a substrate, first, second, third, and fourth support layers, first, second, and third insulating layers, first, second, and third holes, and a capacitor. The first support layer is disposed over the substrate. The first insulating layer is disposed on the first support layer. The second support layer is disposed on the first insulating layer. The third support layer is disposed on the second support layer. The second insulating layer is disposed on the third support layer. The third insulating layer is disposed on the second insulating layer. The fourth support layer is disposed on the third insulating layer. The first hole penetrates through from the second support layer to the first support layer. The second and third holes penetrate through from the fourth support layer to the third support layer. The capacitor is disposed in the first, second, and third holes.
    Type: Grant
    Filed: June 3, 2020
    Date of Patent: March 1, 2022
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Szu-Yao Chang
  • Publication number: 20210384196
    Abstract: The stack capacitor structure includes a substrate, first, second, third, and fourth support layers, first, second, and third insulating layers, first, second, and third holes, and a capacitor. The first support layer is disposed over the substrate. The first insulating layer is disposed on the first support layer. The second support layer is disposed on the first insulating layer. The third support layer is disposed on the second support layer. The second insulating layer is disposed on the third support layer. The third insulating layer is disposed on the second insulating layer. The fourth support layer is disposed on the third insulating layer. The first hole penetrates through from the second support layer to the first support layer. The second and third holes penetrate through from the fourth support layer to the third support layer. The capacitor is disposed in the first, second, and third holes.
    Type: Application
    Filed: June 3, 2020
    Publication date: December 9, 2021
    Inventor: Szu-Yao CHANG
  • Publication number: 20210134805
    Abstract: A semiconductor structure includes a substrate, a drain region, a word line, a gate structure, and a first bit line. The drain region is disposed on the substrate. The gate structure is disposed on the drain region and has a portion in the word line. The first bit line is disposed on the gate structure to serve as a source region.
    Type: Application
    Filed: November 5, 2019
    Publication date: May 6, 2021
    Inventor: Szu-Yao CHANG
  • Patent number: 10453947
    Abstract: A semiconductor device includes a substrate, a flowable dielectric material and a GaN-based semiconductor layer. The substrate has a pit exposed from an upper surface of the substrate, the flowable dielectric material fully fills the pit, and the GaN-based semiconductor layer is disposed over the substrate and the flowable dielectric material.
    Type: Grant
    Filed: June 12, 2018
    Date of Patent: October 22, 2019
    Assignee: VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION
    Inventors: Yung-Fung Lin, Cheng-Wei Chou, Szu-Yao Chang, Cheng-Tao Chou, Hsiu-Ming Chen