Patents by Inventor Szu-Yuan Chuang

Szu-Yuan Chuang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Monitoring apparatus for polishing pad and method thereof
    Patent number: 6995850
    Abstract: A monitoring apparatus for a polishing pad. A chemical mechanical polishing machine, a polishing pad, a measuring device, and a display device are provided. The polishing pad is situated in a predetermined position in the chemical mechanical polishing machine. The measuring device is coupled to the chemical mechanical polishing machine to measure the thickness of the polishing pad. The measured thickness of the polishing pad is displayed on the display device.
    Type: Grant
    Filed: December 24, 2002
    Date of Patent: February 7, 2006
    Assignee: Vanguard International Semiconductor Corporation
    Inventor: Szu-Yuan Chuang
  • Monitoring apparatus for polishing pad and method thereof
    Publication number: 20030123067
    Abstract: A monitoring apparatus for a polishing pad. A chemical mechanical polishing machine, a polishing pad, a measuring device, and a display device are provided. The polishing pad is situated in a predetermined position in the chemical mechanical polishing machine. The measuring device is coupled to the chemical mechanical polishing machine to measure the thickness of the polishing pad. The measured thickness of the polishing pad is displayed on the display device.
    Type: Application
    Filed: December 24, 2002
    Publication date: July 3, 2003
    Inventor: Szu-Yuan Chuang