Patents by Inventor T. C. Smith

T. C. Smith has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for doping strained heterojunction semiconductor devices and structure
    Patent number: 5565690
    Abstract: A method for doping a strained heterojunction semiconductor device includes heating a substrate (16) having a strained mono-crystalline semiconductor region (22) to a temperature above room temperature. While the substrate (16) is heated, dopants are ion implanted into the strained mono-crystalline semiconductor region (22) to minimize implant related damage. Thereafter the substrate (16) is heated under non-steady state conditions for a time sufficient to activate the implanted dopant and anneal implant related damage while minimizing relaxation of the strained heterojunction.
    Type: Grant
    Filed: February 2, 1995
    Date of Patent: October 15, 1996
    Assignee: Motorola, Inc.
    Inventors: N. David Theodore, Donald Y. C. Lie, T. C. Smith, John W. Steele