Patents by Inventor T. Earl Allen

T. Earl Allen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8883575
    Abstract: A process may include forming a mask directly on and above a region selected as an initial semiconductor fin on a substrate and reducing the initial semiconductor fin forming a semiconductor fin that is laterally thinned from the initial semiconductor fin. The process may be carried out causing the mask to recede to a greater degree in the lateral direction than the vertical direction. In various embodiments, the process may include removing material from the fin semiconductor to achieve a thinned semiconductor fin, which has receded beneath the shadow of the laterally receded mask. Electronic devices may include the thinned semiconductor fin as part of a semiconductor device.
    Type: Grant
    Filed: April 5, 2012
    Date of Patent: November 11, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Mark Fischer, T. Earl Allen, H. Montgomery Manning
  • Publication number: 20120190184
    Abstract: A process may include forming a mask directly on and above a region selected as an initial semiconductor fin on a substrate and reducing the initial semiconductor fin forming a semiconductor fin that is laterally thinned from the initial semiconductor fin. The process may be carried out causing the mask to recede to a greater degree in the lateral direction than the vertical direction. In various embodiments, the process may include removing material from the fin semiconductor to achieve a thinned semiconductor fin, which has receded beneath the shadow of the laterally receded mask. Electronic devices may include the thinned semiconductor fin as part of a semiconductor device.
    Type: Application
    Filed: April 5, 2012
    Publication date: July 26, 2012
    Inventors: Mark Fischer, T. Earl Allen, H. Montgomery Manning
  • Patent number: 8154081
    Abstract: A process may include first etching a trench isolation dielectric through a dielectric hard mask that abuts the sidewall of a fin semiconductor. The first etch can be carried out to expose at least a portion of the sidewall, causing the dielectric hard mask to recede to a greater degree in the lateral direction than the vertical direction. The process may include second etching the fin semiconductor to achieve a thinned semiconductor fin, which has receded beneath the shadow of the laterally receded hard mask. The thinned semiconductor fin may have a characteristic dimension that can exceed photolithography limits. Electronic devices may include the thinned semiconductor fin as part of a field effect transistor.
    Type: Grant
    Filed: January 31, 2011
    Date of Patent: April 10, 2012
    Assignee: Micron Technology, Inc.
    Inventors: Mark Fischer, T. Earl Allen, H. Montgomery Manning
  • Publication number: 20110121392
    Abstract: A process may include first etching a trench isolation dielectric through a dielectric hard mask that abuts the sidewall of a fin semiconductor. The first etch can be carried out to expose at least a portion of the sidewall, causing the dielectric hard mask to recede to a greater degree in the lateral direction than the vertical direction. The process may include second etching the fin semiconductor to achieve a thinned semiconductor fin, which has receded beneath the shadow of the laterally receded hard mask. The thinned semiconductor fin may have a characteristic dimension that can exceed photolithography limits. Electronic devices may include the thinned semiconductor fin as part of a field effect transistor.
    Type: Application
    Filed: January 31, 2011
    Publication date: May 26, 2011
    Inventors: Mark Fischer, T. Earl Allen, H. Montgomery Manning
  • Patent number: 7935602
    Abstract: The invention includes methods of forming isolation regions. An opening can be formed to extend into a semiconductor material, and an upper periphery of the opening can be protected with a liner while a lower periphery is unlined. The unlined portion can then be etched to form a widened region of the opening. Subsequently, the opening can be filled with insulative material to form an isolation region. Transistor devices can then be formed on opposing sides of the isolation region, and electrically isolated from one another with the isolation region. The invention also includes semiconductor constructions containing an electrically insulative isolation structure extending into a semiconductor material, with the structure having a bulbous bottom region and a stem region extending upwardly from the bottom region to a surface of the semiconductor material.
    Type: Grant
    Filed: June 28, 2005
    Date of Patent: May 3, 2011
    Assignee: Micron Technology, Inc.
    Inventors: Hongmei Wang, Fred D. Fishburn, Janos Fucsko, T. Earl Allen, Richard H. Lane, Robert J. Hanson, Kevin R. Shea
  • Patent number: 7880232
    Abstract: A process may include first etching a trench isolation dielectric through a dielectric hard mask that abuts the sidewall of a fin semiconductor. The first etch can be carried out to expose at least a portion of the sidewall, causing the dielectric hard mask to recede to a greater degree in the lateral direction than the vertical direction. The process may include second etching the fin semiconductor to achieve a thinned semiconductor fin, which has receded beneath the shadow of the laterally receded hard mask. The thinned semiconductor fin may have a characteristic dimension that can exceed photolithography limits. Electronic devices may include the thinned semiconductor fin as part of a field effect transistor.
    Type: Grant
    Filed: November 1, 2006
    Date of Patent: February 1, 2011
    Assignee: Micron Technology, Inc.
    Inventors: Mark Fischer, T. Earl Allen, H. Montgomery Manning
  • Publication number: 20080102570
    Abstract: A process may include first etching a trench isolation dielectric through a dielectric hard mask that abuts the sidewall of a fin semiconductor. The first etch can be carried out to expose at least a portion of the sidewall, causing the dielectric hard mask to recede to a greater degree in the lateral direction than the vertical direction. The process may include second etching the fin semiconductor to achieve a thinned semiconductor fin, which has receded beneath the shadow of the laterally receded hard mask. The thinned semiconductor fin may have a characteristic dimension that can exceed photolithography limits. Electronic devices may include the thinned semiconductor fin as part of a field effect transistor.
    Type: Application
    Filed: November 1, 2006
    Publication date: May 1, 2008
    Inventors: Mark Fischer, T. Earl Allen, H. Montgomery Manning
  • Patent number: 6685132
    Abstract: A wire stringing cart for laying out wire in the making of a fence. The wire stringing cart includes a frame assembly designed to be a two-wheel cart with a crossbar member for holding a spool of wire that can be laid out as the cart is moved. The assembly also has a toolbox for housing the tools utilized in making a fence of this sort.
    Type: Grant
    Filed: January 18, 2002
    Date of Patent: February 3, 2004
    Inventor: T. Earl Allen