Patents by Inventor T. Grant Davis

T. Grant Davis has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Alignment target for electron-beam write system
    Patent number: 4351892
    Abstract: An alignment target for an electron-beam direct write system is formed on a wafer of semiconductor material. First, a layer of silicon oxide is formed on a surface of the wafer. Then a layer of silicon nitride is formed on the oxide. Next, an opening is etched in the nitride layer to expose a surface portion of the oxide. The surface portion of the oxide is then etched to form a hole in the oxide. The hole is formed such that the oxide layer is undercut beneath the nitride layer such that a cantilevered nitride overhang is formed around the perimeter of the hole. A layer of aluminum is then deposited over the nitride layer.
    Type: Grant
    Filed: May 4, 1981
    Date of Patent: September 28, 1982
    Assignee: Fairchild Camera & Instrument Corp.
    Inventor: T. Grant Davis