Patents by Inventor T. Ohkusa

T. Ohkusa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for fabricating spherical shaped semiconductor integrated circuits
    Patent number: 5975011
    Abstract: An apparatus and method for fabricating integrated circuits according to which a plurality of members of a semiconductor material are continuously introduced into a chamber. A process gas is introduced into the chamber in a direction extending at an angle to the direction of passage of the members into the chamber in a manner so that the gas contacts the members during its passage through the chamber to treat the members.
    Type: Grant
    Filed: December 22, 1997
    Date of Patent: November 2, 1999
    Assignee: Ball Semiconductor, Inc.
    Inventors: T. Ohkusa, Ram K. Ramamurthi