Abstract: A particle counting method comprises obtaining first particle information related to the gas to be measured by a first particle counter with a first particle size detection range, obtaining second particle information related to the gas to be measured by a second particle counter with a second particle size detection range, and generating particle size distribution information according to the first and second particle information. The first particle information includes a plurality of particle size ranges and a plurality of particle quantities wherein each of the plurality of particle size ranges corresponds to a respective one of the plurality of particle quantities, the second particle information includes the quantity of particles of which the size values are in the second particle size range, and the lower limit of the second particle size range is lower than that of the first particle size range.

Abstract: A particle counting method comprises obtaining first particle information related to the gas to be measured by a first particle counter with a first particle size detection range, obtaining second particle information related to the gas to be measured by a second particle counter with a second particle size detection range, and generating particle size distribution information according to the first and second particle information. The first particle information includes a plurality of particle size ranges and a plurality of particle quantities wherein each of the plurality of particle size ranges corresponds to a respective one of the plurality of particle quantities, the second particle information includes the quantity of particles of which the size values are in the second particle size range, and the lower limit of the second particle size range is lower than that of the first particle size range.

Abstract: A planar moving apparatus includes a moving stage, a first driving apparatus, a second driving apparatus and a base member. The base member carries the stage, the first driving apparatus and the second driving apparatus. The first driving apparatus drives the moving stage along a first axial direction and the second driving apparatus drives the moving stage along a second axial direction. The first driving apparatus and the second driving apparatus operate independently and do not interfere with each other when the moving stage moves along either the first axial direction or the second axial direction.