Patents by Inventor Ta-Hsing Fu

Ta-Hsing Fu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of wet processing
    Patent number: 6248670
    Abstract: An apparatus for wet processing of substrates in a controlled environment. It is a single-substrate processing apparatus which is capable of carrying out etching, rinsing, and drying processes all in a single apparatus and in a controlled environment. A closed processing chamber is provided for processing a substrate in a closed environment. Processing liquids and gases are introduced into the chamber and the chamber is rotated with the substrate. Temperature inside the chamber is controlled by heating the gases. Humidity is controlled by varying the proportion of water vapor. The rotation of the chamber with the substrate creates a stable environment where processing parameters are more easily controlled.
    Type: Grant
    Filed: January 17, 2000
    Date of Patent: June 19, 2001
    Assignee: Techpoint Pacific Singapore PTE. Ltd.
    Inventors: Ching-Chang Alex Hung, Ta-Hsing Fu
  • Wet processing apparatus
    Patent number: 6027602
    Abstract: An apparatus for wet processing of substrates in a controlled environment. It is a single-substrate processing apparatus which is capable of carrying out etching, rinsing, and drying processes all in a single apparatus and in a controlled environment. A closed processing chamber is provided for processing a substrate in a closed environment. Processing liquids and gases are introduced into the chamber and the chamber is rotated with the substrate. Temperature inside the chamber is controlled by heating the gases. Humidity is controlled by varying the proportion of water vapor. The rotation of the chamber with the substrate creates a stable environment where processing parameters are more easily controlled.
    Type: Grant
    Filed: August 29, 1997
    Date of Patent: February 22, 2000
    Assignee: Techpoint Pacific Singapore Pte. Ltd.
    Inventors: Ching-Chang Alex Hung, Ta-Hsing Fu