Abstract: A wafer inspection system for inspecting a wafer comprises a platform, a probe card, a illuminator, a test server, at least one image processing device, a control circuit board, at least a test circuit board, a load board connected to the control circuit board and the at least a test circuit board, at least an image card, and at least a relay board. The probe card includes an opening hole and a plurality of probes for contacting the wafer to transmit and receive electrical signals. The illuminator illuminates on the wafer through the opening hole. The test server is controlled to execute test procedure and data process. The test circuit board transmits test signals and performs a determination on the received result signals. The relay board is connected to the probe card and the load board for switching the direction of data flow.

Abstract: A burn-in oven having an inverter fan and a heat regulator includes a housing, a frame, a heater, a temperature sensor, an inverter fan, and a control unit. The housing includes an air-in port and an air-out port. The frame is fixedly arranged inside the housing, and is divided into a variety of partitions. In addition, the heater and the temperature sensor are also fixedly arranged inside the housing. The inverter fan is provided for supplying a forced air-flow toward inside of the housing. The control unit is electrically connected with the temperature sensor, the heater, and the inverter fan. The control unit is provided for controlling the temperature inside the housing not to exceed a predetermined value. Thereby, the present invention saves energy and shortens effectively the time required for burn-in temperature rising and lowering, and saves working hours and manpower as well.