Patents by Inventor Ta-Yu LO

Ta-Yu LO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Systems and methods for preventing stiction of high aspect ratio structures and/or repairing high aspect ratio structures
    Patent number: 11854792
    Abstract: A method for treating high aspect ratio (HAR) structures arranged on a surface of a substrate includes a) spin rinsing the surface of the substrate using a first rinsing liquid; b) spinning off the first rinsing liquid from the surface of the substrate; and c) directing a gas mixture containing hydrogen fluoride onto the surface of the substrate after the first rinsing liquid is dispensed.
    Type: Grant
    Filed: October 11, 2018
    Date of Patent: December 26, 2023
    Assignee: LAM RESEARCH AG
    Inventors: Dries Dictus, Ta-Yu Lo
  • SYSTEMS AND METHODS FOR PREVENTING STICTION OF HIGH ASPECT RATIO STRUCTURES AND/OR REPAIRING HIGH ASPECT RATIO STRUCTURES
    Publication number: 20210193456
    Abstract: A method for treating high aspect ratio (HAR) structures arranged on a surface of a substrate includes a) spin rinsing the surface of the substrate using a first rinsing liquid; b) spinning off the first rinsing liquid from the surface of the substrate; and c) directing a gas mixture containing hydrogen fluoride onto the surface of the substrate after the first rinsing liquid is dispensed.
    Type: Application
    Filed: October 11, 2018
    Publication date: June 24, 2021
    Inventors: Dries DICTUS, Ta-Yu LO