Patents by Inventor Tadahiro Suhara

Tadahiro Suhara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate transfer and bath apparatus
    Patent number: 5976198
    Abstract: The substrate processing apparatus comprises at least one chemical liquid bath for processing the substrate with a chemical liquid, and a multi-function processing bath for performing at least two of chemical liquid processing, cleaning with water and drying on the substrate which is processed with a chemical liquid within the chemical liquid bath.
    Type: Grant
    Filed: June 6, 1996
    Date of Patent: November 2, 1999
    Assignee: Dainippon Screen Mfg. Co., Ltd.
    Inventors: Tadahiro Suhara, Kenji Sugimoto