Abstract: A storage rack includes a plurality of storage portions each configured to store a container. The container has a supported portion and an intake portion in a bottom surface of the container, the intake portion supplying gas into the container, wherein the center of gravity of the container is located between the supported portion and the intake portion as seen along a vertical direction. Provided to each of the storage portions are a container support in which a support surface is formed for supporting the supported portion from below, a nozzle configured to contact the intake portion from below to supply gas into the container through the intake portion, and a restriction member configured to contact a side surface of the container when stored on the storage portion to restrict movement of the container along a horizontal direction. The container is supported only by the support surface and the nozzle.

Abstract: An article transport device includes a transport mechanism which is configured to support, from below, a container being transported and to transport the container along a transporting path, and a housing which forms an accommodating space in which at least a part of the transport mechanism is housed. The housing has one or more support plates, a plurality of brackets, and a housing panel. Each of the one or more support plates is a plate-shaped member extending along the transporting path and is configured to support the transport mechanism from below. A lower end portion of each of the plurality of brackets is attached to a corresponding one of the one or more support plates such that the plurality of the brackets are spaced apart from one another along a direction along the transporting path, outside the accommodating space along the lateral width direction.

Abstract: A flow measuring device includes an intake portion configured to be connected to an ejecting portion, one or more gas lines each of which is connected to the intake portion and in which gas ejected from the ejecting portion flows, one or more flow meters each of which is configured to measure a flow rate of gas that flows through corresponding one of the one or more gas lines, at least one resisting member configured to provide resistance to flow of gas in at least one of the one or more gas lines, a main body portion which includes one or more supported portions each configured to be supported by the support member, the main body portion being configured to support the intake portion, the one or more gas lines, the one or more flow meters, and the at least one resisting member. The magnitude of the resistance provided by the at least one resisting member is adjustable.

Abstract: A container storage facility includes a storage rack having a plurality of storage sections as storage section groups, a gas supply device configured to supply a cleaning gas to the storage sections via a branch-type supply pipe, a transport apparatus configured to transport containers to the storage sections, and a control unit configured to control operations of the transport apparatus. When a plurality of containers are to be stored in the storage sections, the control unit controls the operations of the transport apparatus so as to transport the containers of the same type to the storage sections that belong to the same storage section group.

Abstract: A transport space Si is formed in front of an article storage rack 1, and a plurality of up-down partition bodies that partition storage sections 1a adjacent to each other in an up-down direction are provided in the article storage rack 1. A flow path space S2 extending in the up-down direction is formed between a wall portion 43 and the plurality of storage sections 1a, and each of the plurality of storage sections 1a is located between the flow path space S2 and the transport space S1, and is in communication with the flow path space S2 and the transport space S1. A gas supply portion 51 includes a flow inlet 53 into which a gas from the outside flows, and is in communication with an upper end portion of the transport space S1 and an upper end portion of the flow path space S2.

Abstract: A wall member that covers lateral sides of an article storage rack includes a main wall portion that is installed in an orientation in which it extends along a vertical direction at a position that is spaced apart upward from an installation floor, and a sub-wall portion that is installed at a position that is spaced apart upward from the installation floor. An inlet port is formed at an upper end of the main wall portion, a first space surrounded by the main wall portion and a second space directly below the sub-wall portion are in communication with each other, an outlet port is formed below an end portion of the sub-wall portion on a second side, and an end portion of the sub-wall portion on a first side is connected to a lower end of the main wall portion in a state in which the flow of air between the sub-wall portion and the main wall portion is restricted.

Abstract: A container storage facility has storage portions for storing containers, and supplies a purge gas to the interior of the containers. The container storage facility includes ejection portions that eject the purge gas, a gas supply device that controls the supply flow rate of the purge gas, a main pipe that conducts the purge gas output from the gas supply device, and branch pipes that are branched from the main pipe and are connected to the ejection portions. The ejection portions eject the purge gas regardless of whether or not containers are stored in the storage portions, and the gas supply device controls the supply flow rate of the purge gas so as to increase as the total number of containers stored in the storage portions decreases.

Abstract: A flow measuring device includes an intake portion configured to be connected to an ejecting portion, one or more gas lines each of which is connected to the intake portion and in which gas ejected from the ejecting portion flows, one or more flow meters each of which is configured to measure a flow rate of gas that flows through corresponding one of the one or more gas lines, at least one resisting member configured to provide resistance to flow of gas in at least one of the one or more gas lines, a main body portion which includes one or more supported portions each configured to be supported by the support member, the main body portion being configured to support the intake portion, the one or more gas lines, the one or more flow meters, and the at least one resisting member. The magnitude of the resistance provided by the at least one resisting member is adjustable.

Abstract: A container storage facility includes a storage rack that has a plurality of storage sections as a storage section group, a gas supply device for supplying a cleaning gas to the storage sections via a branch-type supply pipe, a transport apparatus for transporting containers to the storage sections, and a control unit for controlling operation of the transport apparatus. When a container is first stored in a storage section included in the storage section group, the control unit controls operations of the transport apparatus so as to transport the container to a storage section to which the cleaning gas is supplied from an end area of the supply pipe.

Abstract: A gas supplying device has a plurality of connectors each of which is configured to be connected to a container stored in the corresponding one of supplying storage sections, supply lines configured to divide and supply gas to the plurality of connectors, and a mass flow controller configured to control a flow rate of gas that flows through one of the supply lines. The supply lines include first supply lines each of which is installed to a corresponding supplying storage sections, a second supply line installed upstream of the first supply lines, and a branching supply line for dividing gas supplied from the second supply line into the first supply lines. The mass flow controller is installed in the second supply line and in an installation area.

Abstract: An article transport device includes a transport mechanism which is configured to support, from below, a container being transported and to transport the container along a transporting path, and a housing which forms an accommodating space in which at least a part of the transport mechanism is housed. The housing has one or more support plates, a plurality of brackets, and a housing panel. Each of the one or more support plates is a plate-shaped member extending along the transporting path and is configured to support the transport mechanism from below. A lower end portion of each of the plurality of brackets is attached to a corresponding one of the one or more support plates such that the plurality of the brackets are spaced apart from one another along a direction along the transporting path, outside the accommodating space along the lateral width direction.

Abstract: An article storage facility is provided which is relatively simple in structure and in which it is easier to perform maintenance work of apparatus provided to each zone. A first switching valve is provided in each of a plurality of zone gas supply portions whereas a second switching valve is provided in each of a plurality of storage section gas supply portions. A plurality of relief passages is provided with each relief passage connected to the inactive gas supply passage on a downstream side, with respect to a gas supplying direction, of the position in which the first switching valve is provided and on an upstream side, with respect to the gas supplying direction, of the position in which the second switching valve is provided in the inactive gas supply passage. A zone relief switching valve is provided to each of the plurality of relief passages.

Abstract: An inspection apparatus used for an article storage facility includes an inactive gas supply portion provided with a supply nozzle provided in a placement support portion. A transport container having a supply port for an inactive gas is formed at a bottom portion thereof for accommodating substrates in a sealed state. The nozzle is joined to the supply port by a self weight of the transport container supported on the placement support portion so as to inject the inactive gas to an interior of the transport container. An inspection supply port is joined to the supply nozzle by a self weight of the inspection apparatus supported on the placement support portion, and is configured such that a gravity center position is supported on the placement support portion and coincides with a gravity center position of the transport container, the supply port inspects a state of supply of the inactive gas in the state of being supported on the placement support portion.

Abstract: A processing facility is disclosed in which a container side contact surface and a support side contact surface are in contact with each other and a supply hole or a discharge hole, and a communicating hole are allowed to communicate with each other when a container is supported by a container support, and in which the container side contact surface is formed to be flat at least in a periphery of the communicating hole, and the support side contact surface is formed to have a shape that is gradually lower as a distance increases from the supply hole or the discharge hole.

Abstract: An article storage facility is provided which is relatively simple in structure and in which it is easier to perform maintenance work of apparatus provided to each zone. A first switching valve is provided in each of a plurality of zone gas supply portions whereas a second switching valve is provided in each of a plurality of storage section gas supply portions. A plurality of relief passages is provided with each relief passage connected to the inactive gas supply passage on a downstream side, with respect to a gas supplying direction, of the position in which the first switching valve is provided and on an upstream side, with respect to the gas supplying direction, of the position in which the second switching valve is provided in the inactive gas supply passage. A zone relief switching valve is provided to each of the plurality of relief passages.

Abstract: An inspection apparatus used for an article storage facility includes an inactive gas supply portion provided with a supply nozzle provided in a placement support portion. A transport container having a supply port for an inactive gas is formed at a bottom portion thereof for accommodating substrates in a sealed state. The nozzle is joined to the supply port by a self weight of the transport container supported on the placement support portion so as to inject the inactive gas to an interior of the transport container. An inspection supply port is joined to the supply nozzle by a self weight of the inspection apparatus supported on the placement support portion, and is configured such that a gravity center position is supported on the placement support portion and coincides with a gravity center position of the transport container, the supply port inspects a state of supply of the inactive gas in the state of being supported on the placement support portion.

Abstract: A storage facility is achieved that is capable of suppressing, with a simple configuration, the inactive gas concentration in the gas discharged to the outside of a storage space. The storage facility includes a storage device including a plurality of storage sections in an inside of a storage space formed so as to be partitioned from the outside, and an inactive gas supply portion that supplies inactive gas to an inside of a container stored in the storage section. The storage device includes a gas discharge portion that discharges, to the outside of the storage space, gas within the storage space that contains the gas discharged from the container. The gas discharge portion includes a restricting orifice portion serving as a restricting portion that restricts a flow rate of gas, and the restricting orifice portion is formed below a region where the storage sections are disposed.

Abstract: A processing facility is disclosed in which a container side contact surface and a support side contact surface are in contact with each other and a supply hole or a discharge hole, and a communicating hole are allowed to communicate with each other when a container is supported by a container support, and in which the container side contact surface is formed to be flat at least in a periphery of the communicating hole, and the support side contact surface is formed to have a shape that is gradually lower as a distance increases from the supply hole or the discharge hole.

Abstract: An object of the invention is to provide a cleaning device for a ceiling transport facility in which a plurality of locations to be cleaned can be cleaned appropriately while avoiding having insufficient suction power for the plurality of cleaning suction portions. A travelling guide portion for a transport carriage is provided on the ceiling side. The cleaning carriage that can travel along the travelling guide portion is provided with a plurality of cleaning suction portions for performing suctioning action on a plurality of locations to be cleaned in the travelling guide portion and a vacuum cleaner which is in communication with the plurality of cleaning suction portions. The plurality of cleaning suction portions are divided to a plurality of functioning units. And an interrupting device is provided for selectively permitting and preventing the communication of each of the plurality of the functioning units with the vacuum cleaner.

Abstract: An object of the invention is to provide a cleaning device for a ceiling transport facility in which a plurality of locations to be cleaned can be cleaned appropriately while avoiding having insufficient suction power for the plurality of cleaning suction portions. A travelling guide portion for a transport carriage is provided on the ceiling side. The cleaning carriage that can travel along the travelling guide portion is provided with a plurality of cleaning suction portions for performing suctioning action on a plurality of locations to be cleaned in the travelling guide portion and a vacuum cleaner which is in communication with the plurality of cleaning suction portions. The plurality of cleaning suction portions are divided to a plurality of functioning units. And an interrupting device is provided for selectively permitting and preventing the communication of each of the plurality of the functioning units with the vacuum cleaner.