Patents by Inventor Tadahiyo Ohmi

Tadahiyo Ohmi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for supplying ultrahigh purity gas
    Patent number: 5230721
    Abstract: An apparatus for suppying ultrahigh purity gas to a semiconductor manufacturing unit.The apparatus includes ceramic filter which is disposed on at least part of a pipe line connected to the gas introduction inlet of the manufacturing unit and a purging mechanism provided between said filter and said manufacturing unit for purging involved impurity gas to the outside of the system.
    Type: Grant
    Filed: September 9, 1991
    Date of Patent: July 27, 1993
    Inventor: Tadahiyo Ohmi