Abstract: Scattered light from the surface of a sample subjected to the same process as a process for an inspection object is observed, a defect is detected from an intensity of scattered light, and a position of the detected defect and an intensity of scattered light caused by the detected defect are acquired. Defects detected are classified into a group detectable by observing secondary electrons emitted when an electron beam is applied to the surface of the sample and a group not detectable. A decision threshold value of a scattered light intensity for extracting defects to be counted is determined, in accordance with a result of classification by the above steps and the intensity of scattered light caused by the detected defect.

Abstract: (a) Scattered light from the surface of a sample subjected to the same process as a process for an inspection object is observed, a defect is detected from an intensity of scatted light, and a position of the detected defect and an intensity of scattered light caused by the detected defect are acquired. (b) Defects detected at the step (a) are classified into a group detectable by observing secondary electrons emitted when an electron beam is applied to the surface of the sample and a group not detectable. (c) A decision threshold value of a scattered light intensity for extracting defects to be counted is determined, in accordance with a result of classification by the step (b) and the intensity of scattered light caused by the detected defect.

Abstract: A remote-control maneuvering apparatus for a ship having two sets of Z type propelling apparatus, comprising a maneuvering handle adapted to be inclined at any angle about a predetermined point and to be moved in its longitudinal direction, ahead and astern, switching transmitting apparatus adapted to issue signals for switching going ahead and astern in accordance with the travel distance of the handle in one of two components the sum of which constituting the angle of inclination of said handle, steering transmitting apparatus adapted to issue signals for steering the ship to port or starboard side in accordance with the travel distance of the handle in another component, and speed and clutch engaging and disengaging transmitting apparatus adapted to issue signals for controlling the speed of the engines as well as engaging and disengaging the clutch in accordance with the movement of said handle in the longitudinal direction thereof.

Abstract: A twin-shaft Z type propelling arrangement for a tug boat comprises a variable slip transmission, such as a friction clutch provided between the main engine and the Z type propelling mechanism of the boat, and a mechanism for providing variable amount of slip for the transmission mechanism at the minimum speed operation of the engine.