Patents by Inventor Tadanori Egawa

Tadanori Egawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Polishing apparatus
    Patent number: 6997778
    Abstract: A polishing apparatus comprises a polishing tool, a substrate holding member, and a sensor for detecting a failure of a substrate to be polished.
    Type: Grant
    Filed: August 21, 2003
    Date of Patent: February 14, 2006
    Assignees: Ebara Corporation, Kabushiki Kaisha Toshiba
    Inventors: Koji Ono, Shozo Oguri, Kenichi Sasabe, Masato Kurita, Yasuhisa Kojima, Tadanori Egawa, Kenichi Shigeta
  • Polishing apparatus
    Publication number: 20040033761
    Abstract: A polishing apparatus comprises a polishing tool, a substrate holding member, and a sensor for detecting a failure of a substrate to be polished.
    Type: Application
    Filed: August 21, 2003
    Publication date: February 19, 2004
    Inventors: Koji Ono, Shozo Oguri, Kenichi Sasabe, Masato Kurita, Yasuhisa Kojima, Tadanori Egawa, Kenichi Shigeta
  • Polishing apparatus
    Patent number: 6634924
    Abstract: Disclosed is a polishing apparatus that comprises a polishing tool, a substrate holding member, a measuring device to measure a drive current of a drive unit while the drive unit drives at least one of the polishing tool and the substrate holding member, and a failure detection unit to detect either jumping of the substrate from the substrate member or breakage of the substrate. While a substrate is held by a substrate holding member and pressed against the polishing tool during a polishing operation, the failure detection unit will detect jumping of the substrate from the substrate holding member or breakage of the substrate based on a comparison of the value of the drive current with a threshold value, or a comparison of a waveform pattern of the drive current with a predetermined waveform pattern.
    Type: Grant
    Filed: September 27, 2000
    Date of Patent: October 21, 2003
    Assignees: Ebara Corporation, Kabushiki Kaisha Toshiba
    Inventors: Koji Ono, Shozo Oguri, Kenichi Sasabe, Masato Kurita, Yasuhisa Kojima, Tadanori Egawa, Kenichi Shigeta