Abstract: A test support apparatus for a plant monitoring system, includes: a list holding unit configured to hold a test list which describes at least a plurality of test items and information about a testing sequence for the test items; a screen generating unit configured to generate a display screen provided based on an output signal from a control unit which controls a plurality of connected devices; a data acquisition instructing unit configured to give instructions to acquire image data of the display screen based on the testing sequence in the test list; and a data linking unit configured to link the acquired image data to the test items on the test list.

Abstract: A test support apparatus for a plant monitoring system, includes: a list holding unit configured to hold a test list which describes at least a plurality of test items and information about a testing sequence for the test items; a screen generating unit configured to generate a display screen provided based on an output signal from a control unit which controls a plurality of connected devices; a data acquisition instructing unit configured to give instructions to acquire image data of the display screen based on the testing sequence in the test list; and a data linking unit configured to link the acquired image data to the test items on the test list.

Abstract: A working time period grasping system includes: an input unit having a start button for a worker to input start of a product manufacturing work and a completion button for the worker to input completion of the product manufacturing work; and a time period detection unit for detecting a working time period of the product manufacturing work based on information input from the input unit.

Abstract: A charged particle beam exposure apparatus includes an irradiator for irradiating a sample with a charged particle beam, an analog controller for analog controlling the charged particle beam, a digital controller for digital controlling the analog controller, and a digital transmission path connecting the analog controller to the digital controller. The analog controller is disposed inside a room, and the digital controller is disposed outside the room.

Abstract: A column section is disposed within a thermostatic chamber within a clean room, a section for analog controlling each portion of the column section is disposed within the clean room and outside of the thermostatic chamber, and a section for digital controlling the analog control section is disposed outside of the clean room.

Abstract: An electron beam lithographic method in which a sample is irradiated with an electron beam, wherein an extreme point of a contour of a pattern is calculated and a lithographic area is divided into a first region that is surrounded by straight lines drawn from the extreme point in parallel with the x-axis and the y-axis of the sample and by said pattern, and second regions in order to be lithographed.

Abstract: A sample is bidimensionally scanned with an electron beam to display an image of the sample based on a secondary-electron signal generated from the sample. Two marks corresponding to two points on the sample are displayed in superposition to the image and a distance between the two points on the sample is calculated based on coordinates of the marks and a tilting angle of the sample to the electron beam.