Abstract: In a gas insulated breaking device which accommodates open/close elements including a puffer cylinder which compresses an insulation gas and extinguishes an arc and a contact finger which has a slide contact portion which is brought into slide contact with a slide contact portion of the puffer cylinder in the inside of a vessel in which the insulation gas is sealed, a relatively soft plating film is formed on the slide contact portion of the puffer cylinder, and a relatively hard plating film is formed on the slide contact portion of the contact finger, and the silver plating film of each slide contact portion has an inner layer thereof formed of a soft film and an outer layer thereof which constitutes a surface portion formed of a hard film.

Abstract: In a gas insulated breaking device which accommodates open/close elements including a puffer cylinder which compresses an insulation gas and extinguishes an arc and a contact finger which has a slide contact portion which is brought into slide contact with a slide contact portion of the puffer cylinder in the inside of a vessel in which the insulation gas is sealed, a relatively soft plating film is formed on the slide contact portion of the puffer cylinder, and a relatively hard plating film is formed on the slide contact portion of the contact finger, and the silver plating film of each slide contact portion has an inner layer thereof formed of a soft film and an outer layer thereof which constitutes a surface portion formed of a hard film.

Abstract: In a gas insulated breaking device which accommodates open/close elements including a puffer cylinder which compresses an insulation gas and extinguishes an arc and an electricity supply means which has a slide contact portion which is brought into slide contact with a slide contact portion of the puffer cylinder in the inside of a vessel in which the insulation gas is sealed, a relatively soft plating film is formed on the slide contact portion of the puffer cylinder, and a relatively hard plating film is formed on the slide contact portion of the electricity supply means, and the silver plating film of each slide contact portion has an inner layer thereof formed of a soft film and an outer layer thereof which constitutes a surface portion formed of a hard film.

Abstract: A gas sensor which can be used for measuring a low concentration repeatedly, which has a quick response and which can be used for a long time with high stability is provided. The gas sensor comprises a solid electrolyte, a detecting electrode provided in contact with one of the surfaces of the solid electrolyte and exposed to a gas to be detected, a counter electrode, provided in contact with the other surface of the solid electrolyte, and lead wires to place an electric voltage across both electrodes or to take out electric signals, wherein an inactive substance which is hard to form a reaction product with the gas to be detected is used as a material to constitute both electrodes.

Abstract: An optical processing apparatus for processing optically a workpiece (7) by using a light beam (B). The apparatus is capable of automatically adjusting a imaging magnification to a predetermined value and at the same time maintaining constant a imaging magnification regardless of exchange of masks (3; 100) and workpieces (7) and for ensuring an extended use life of a mask with satisfactory mask function.

Abstract: An excimer laser beam irradiation apparatus capable of processing a workpiece optimally with an excimer irradiation beam even when intensity distribution of the excimer laser beam undergone multiple reflections is non-uniform. A patterning mask has light-transmissive portions for allowing the excimer laser beam to pass through and a reflecting layer for reflecting it. A high reflectivity mirror disposed in opposition to the reflecting layer reflects the excimer laser beam reflected from the reflecting layer toward the patterning mask. An imaging lens images a pattern of the excimer laser beam transmitted through the patterning mask onto a workpiece for irradiation thereof. A workpiece moving mechanism and a mask moving mechanism move the workpiece and the mask moving mechanism, respectively.

Abstract: At least the opposing surface portions of the main electrodes of an excimer laser device are covered with materials which are resistive to chemical etching than nickel. The etching resistive material may be a platinum based alloy containing rhodium, ruthenium, iridium, or osmium; a nickel based alloy containing gold, platinum, rhodium, ruthenium, iridium, or osmium; or rhodium, ruthenium, iridium, or osmium. Thus, an excimer laser device is realized by which the lives of the electrodes and the laser gas are prolonged.

Abstract: A gas control device in a halogen gas laser device which comprises: a filter for receiving a small quantity of deteriorated gas from the upstream portion of the laser gas circulating path to convert it into a low-boiling-point gas; and a gas detector for measuring the density of the low-boiling-point gas thus formed, to estimate the halogen gas density, and outputting, when the density is lower than a predetermined value, an instruction signal to supply halogen gas.

Abstract: A lightning arrester monitor which consists of an oxygen gas sensor provided in a lightning arrester having a zinc-oxide-type element made of zinc oxide, the main component thereof, and other oxides added thereto, the oxygen gas sensor measures the oxygen concentration of the element which increases as degradation thereof goes on. The monitor makes it possible to assess degradation of the zinc-oxide-type element with ease, without requiring any complicated electrical circuit for detecting leakage current.

Abstract: An element for detecting internal faults in an insulating gas charged electrical apparatus comprises a substrate disposed in the electrical apparatus charged with an insulating gas, a pair of electrodes disposed on the substrate, and a thin metal film covering the pair of electrodes and the exposed surface of the substrate. This film is capable of producing fluorides with low conductivity upon reacting with a decomposed gas produced by internal faults of the electrical apparatus. Since the thin metal film exhibits high response characteristics readily in reaction with even a trace amount of a decomposed gas, it is possible to promptly detect faults occurring in the electrical apparatus, such as a partial discharge or local heating. In addition, a device for detecting internal faults in an insulating gas charge electrical apparatus using the internal fault detection element utilizes an optical signal for transmitting signals.