Abstract: Described herein is a technique capable of detecting a substrate state without contacting the substrate. According to one aspect of the technique, there is provided (a) loading a substrate retainer, where a plurality of substrates is placed, into a reaction tube; (b) processing the plurality of the substrates by supplying a gas into the reaction tube; (c) unloading the substrate retainer out of the reaction tube after the plurality of the substrates is processed; and (d) detecting the plurality of the substrates placed on the substrate retainer after the substrate retainer is rotated by a first angle with respect to a transferable position, wherein the plurality of the substrates is transferable to/from the substrate retainer in the transferable position.

Abstract: A high performance sealing device having an excellent pressure resistance and realizing a prevention of damage. The sealing device usable at a working pressure of 0 to 2 MPa, and not damaged even if the pressure of high-pressure fuel of 5 MPa or higher is applied thereto, wherein high pressure fuel on the high pressure side is sealed by a first seal part, oil from a cam side on a low pressure side is sealed by a second seal part, and the fuel slightly leaked due to failure of scraping at the first seal part is sealed by the second seal part to form a dual seal structure. A resin ring coming into slidable sealing contact with a shaft is used in the first seal part, whereby abnormal abrasion does not occur even when fuel having less lubricity is used, and the durability of the seal is increased.

Abstract: A high performance sealing device having an excellent pressure resistance and realizing a prevention of damage. The sealing device usable at a working pressure of 0 to 2 MPa, and not damaged. even if the pressure of high-pressure fuel of 5 MPa or higher is applied thereto, wherein high pressure fuel on the high pressure side H is sealed by a first seal part 2, oil from a cam side on a low pressure side L is sealed by a second seal part 3, and the fuel slightly leaked due to failure of scraping at the first seal part is sealed by the second seal part to form a dual seal structure, and a resin ring 21 coming into slidable sealing contact with a shaft 10 is used in the first seal part 2, whereby abnormal abrasion does not occur even when fuel having less lubricity is used, and the durability of the seal is increased.

Abstract: A high performance sealing device having an excellent pressure resistance and realizing a prevention of damage. The sealing device usable at a working pressure of 0 to 2 MPa, and not damaged even if the pressure of high-pressure fuel of 5 MPa or higher is applied thereto, wherein high pressure fuel on the high pressure side H is sealed by a first seal part 2, oil from a cam side on a low pressure side L is sealed by a second seal part 3, and the fuel slightly leaked due to failure of scraping at the first seal part is sealed by the second seal part to form a dual seal structure, and a resin ring 21 coming into slidable sealing contact with a shaft 10 is used in the first seal part 2, whereby abnormal abrasion does not occur even when fuel having less lubricity is used, and the durability of the seal is increased.

Abstract: A high performance sealing device having an excellent pressure resistance and realizing a prevention of damage. The sealing device usable at a working pressure of 0 to 2 MPa, and not damaged even if the pressure of high-pressure fuel of 5 MPa or higher is applied thereto, wherein high pressure fuel on the high pressure side H is sealed by a first seal part 2, oil from a cam side on a low pressure side L is sealed by a second seal part 3, and the fuel slightly leaked due to failure of scraping at the first seal part is sealed by the second seal part to form a dual seal structure, and a resin ring 21 coming into slidable sealing contact with a shaft 10 is used in the first seal part 2, whereby abnormal abrasion does not occur even when fuel having less lubricity is used, and the durability of the seal is increased.

Abstract: A seal ring is provided, which is capable of maintaining a stable sealing performance for a long period, in which a cut portion is provided at one position in a circumferential direction of a seal ring, a convex portion is provided at a first cut end portion, a recess portion is provided at a second cut end portion, and the end portions of a third surface and a sixteenth surface extending in the circumferential direction among the convex portion and recess portion correspond to a portion of a second seal portion for sealing a side wall surface of an annular groove.

Abstract: The invention relates to a combustion gas seal for injectors and to a seal structure disposed therewith, for preventing leakage of combustion gas in a state in which an injector is mounted to an engine head. And, the number of parts is reduced, vibration and noise are reduced, and sealing performance is improved. A tapered surface, in which an clearance between the tapered surface and an inner peripheral surface of a mounting hole of the engine head narrows from an engine bore side towards an atmospheric side, is disposed at a groove bottom of an attachment groove of the injector, and an abutment portion that abuts against the tapered surface is disposed at the combustion gas seal for injectors.

Abstract: A method for readily applying a marking to an object made of PTFE, for example, a seal ring provided with a cut portion on a part of a circumference, or an intermediate product for the seal ring, comprising the steps of preparing an object to be marked that is made of PTFE, irradiating a laser beam onto the object to be marked to alter the state of only an irradiated surface of the PTFE, and forming a marking with a white-based color on the irradiated surface of the PTFE so that the irradiated surface exhibits a color tone different from that of a non-irradiated surface of the PTFE.

Abstract: A high performance sealing device (1) having an excellent pressure resistance, usable at a working pressure of 0 to 2 MPa, and not damaged even if the pressure of high-pressure fuel of 5 MPa or higher is applied thereto, wherein high pressure fuel on the high pressure side (H) is sealed by a first seal part (2), oil from a cam side on a low pressure side (L) is sealed by a second seal part (3), and the fuel slightly leaked through the first seal part (2) is sealed by the second seal part (3) to form a double seal structure, and a resin ring (21) slidably and sealingly coming into contact with a shaft (10) is used in the first seal part (2), whereby abnormal wear does not occur even if fuel with poor lubrication is used, and the durability of the seal is increased.

Abstract: The invention relates to a combustion gas seal for injectors and to a seal structure disposed therewith, for preventing leakage of combustion gas in a state in which an injector is mounted to an engine head. And, the number of parts is reduced, vibration and noise are reduced, and sealing performance is improved. A tapered surface, in which an clearance between the tapered surface and an inner peripheral surface of a mounting hole of the engine head narrows from an engine bore side towards an atmospheric side, is disposed at a groove bottom of an attachment groove of the injector, and an abutment portion that abuts against the tapered surface is disposed at the combustion gas seal for injectors.

Abstract: A seal ring is provided, which is capable of maintaining a stable sealing performance for a long period, in which a cut portion S is provided at one position in a circumferential direction of a seal ring 1, a convex portion 41 is provided at a first cut end portion 4, a recess portion 51 is provided at a second cut end portion, and the end portions of a third surface 41c and a sixteenth surface 51c extending in the circumferential direction among the convex portion 41 and recess portion 51 correspond to a portion of a second seal portion 2 for sealing a side wall surface 81a of an annular groove 81.