Abstract: Described herein is a technique capable of detecting a substrate state without contacting the substrate. According to one aspect of the technique, there is provided (a) loading a substrate retainer, where a plurality of substrates is placed, into a reaction tube; (b) processing the plurality of the substrates by supplying a gas into the reaction tube; (c) unloading the substrate retainer out of the reaction tube after the plurality of the substrates is processed; and (d) detecting the plurality of the substrates placed on the substrate retainer after the substrate retainer is rotated by a first angle with respect to a transferable position, wherein the plurality of the substrates is transferable to/from the substrate retainer in the transferable position.

Abstract: The present invention provides a position detecting device which is operable even when a distance from an image sensor to a corner portion of a coordinate inputting device is shortened, and which enables cost reduction, and an image processing system having the same. In the present invention, a position detecting device is placed on an upper surface portion of a frame body of a coordinate inputting device, and each of at least two image sensors has a wide-angle lens which covers a substantially entire region of side surface and bottom surface portions of the frame body as an image pickup range. The at least two image sensors are arranged adjacent to a control device and fixed to the control device. The position detecting device is placed substantially in a center of the upper surface portion of the coordinate inputting device.