Abstract: Photolithographic alignment marks (e.g., mask and measurement overlay marks) are formed of a pattern of very small marks using the design configuration and rule of a circuit pattern feature. A relatively large mark comprising a pattern of small marks modeled after the circuit pattern feature results in an etch rate within the mark area that is substantially the same as the etch rate in the circuit pattern (e.g., cell or peripheral circuit) area. This allows for simultaneous formation of circuit pattern features, and the alignment marks, in a common etching step, while avoiding underetching (shallow etch depth) due to a microloading effect. In this manner, proper formation of readily detectible marks is ensured.

Abstract: An assembly for measuring a trench depth parameter of a workpiece is disclosed. The assembly has an ultra-violet radiation source; a split fiber bundle having a first branch for propagating the ultra-violet radiation from the radiation source to a lens, and a second branch; a lens for focusing the UV radiation to the workpiece and refocusing an ultra-violet interference signal to the second branch; and a detector responsive to the ultra-violet interference signal received through the second branch. The detector transforms the ultra-violet interference signal to an electrical signal which is a measure of a trench depth of the workpiece. The ultra-violet interference signal is developed when ultra-violet radiation propagates through the workpiece and reflects from its base region to thereby interfere with ultra-violet radiation that is directly reflected by a workpiece surface which is different from the base region.

Abstract: The present invention is a method for forming a three point atomic force microscope tip. The method includes forming a substantially longitudinally extending solid tip having a peripheral surface and a forward end surface. Three masks are formed by deposition of carbon upon the solid tip, with a first and second of the masks formed along the peripheral surface, and a third of the masks formed on the forward end surface. The mask covered tip is then etched for a predetermined period of time to remove material from both the tip and the mask. After the predetermined period of time has elapsed, the masks are completely removed, and the removal of material from the tip results in the formation of three spikes which are pointed to the location from which the masks were removed.

Abstract: According to this invention, there is provided a charged particle detection device including a semiconductor substrate, an insulating film formed on the semiconductor substrate, an electrode formed on the insulating film, a member for forming a potential well, which is constituted by a depletion layer, near a surface of the semiconductor substrate under the electrode, a member for sweeping, into the semiconductor substrate, charges which are generated in the semiconductor substrate by charged particles incident from the electrode and are stored in the potential well, and a member for detecting signal charges generated by the charged particles swept into the semiconductor substrate.

Abstract: A handling apparatus includes a base member having a rotating shaft, of a multijoint arm having one end portion thereof connected to the rotating shaft, a holder mounted at the free end portion of the arm, for holding a wafer, a stepping motor for circling the holder together with the arm about the rotating shaft, and another stepping motor for pivoting the arm joints. The multijoint arm is constituted by a plurality of parallel crank mechanisms arranged on corresponding planes in parallel with the circulating plane. One of the links constituting the first-stage parallel crank mechanism is fixed on the base member. During nonuse of the apparatus, the respective parallel crank mechanism overlap each other on the base member. Pulleys are mounted on joints of the arm, and a wire is wrapped around the pulleys. When at least one of the pulleys is pivoted, the parallel crank mechanisms are displaced, thereby extending or retracting the arm.

Abstract: A surface-mounted-type inductance element comprising a coil structure having a bobbin; the bobbin including a portion around which wires are coiled, a pair of flanges integrally formed at opposing ends of the bobbin, a pair of bases integrally formed at lower edge portions of the flanges in a manner to project laterally from the flanges, and a plurality of external terminals attached to each of the bases in a manner to penetrate the base, each the external terminal including a first portion projecting laterally from the base and a second portion projecting downward from the base, around which first portion of each the external terminal a termination of any one of the wires is wound; a mold covering the coil structure in a manner to allow the second portions of the external terminals to be projected outward from the mold, the mold being formed of resin material exhibiting heat resistance; and a pair of cores assembled to the coil structure through the mold.

Abstract: A ferrite core for the use of a power transformer and/or a choke coil with small size has been found. The core is assembled by a pair of identical core halves (21) together with a bobbin (31) wound a coil. Each of the core halves (21) has an E-shaped structure with a center core (23) on which a coil is wound, a pair of side legs (24) and a base plate (22) which couples the center core (23) with the side legs (24). The cross section of the center core (23) is not circular nor rectangular, but is flat having rectangular portion with a first side (2a) and a second side (b-2a) and a pair of arcs coupled with said first side. The diameter (2a) of the arc is the same as the length of the first side. The transformer is mounted on a printed circuit board so that the axis of the center core (23) is parallel to the printed circuit board. Thus, the height (H) of the transformer is low as compared with that of a prior transformer which has a circular center core.

Abstract: An inductance element of the type that includes a coil bobbin having flanges at the ends thereof, a pair of pot cores engaging the bobbin, and a fastening member for fastening together the pot cores and bobbin. At least one of the bobbin flanges includes a joining part that extends outwardly from the bobbin flange and engages both the adjacent one of the pot cores and the fastening member to prevent relative rotation of the bobbin and adjacent pot core and fastening member. One of the bobbin flanges may include a stepped part having pins extending therefrom for making electrical connection to the inductance element. The stepped part is spaced from the bobbin flange, and connection wires may extend within the space.

Abstract: The new structure of a ferrite core for the use of a power transformer and/or a choke coil has been found. The core is assembled by a pair of identical core halves, and each core half comprises (a) a circular center boss (6), (b) a pair of outer walls (7, 8) positioned at both the sides of said boss for mounting a coil, (c) a pair of base plates (9, 10) coupling said center boss and said outer walls, (d) each of the outer walls being substantially rectangular with an external linear wall and an inner curved wall, (e) the core half being symmetrical with regard to the first plane including a center axis of said boss and being parallel with the external linear walls of said outer walls, (f) a concaved opening (R) being provided between said base plates in the first side of the core half with regard to the reference plane which includes a center axis of said boss and is perpendicular to said first plane, (g) the length (B.sub.

Abstract: The new structure of a ferrite core for the use of a power transformer and/or a choke coil has been found. The core is assembled by a pair of identical core halves, and each of core half comprises (a) a circular center boss(12), (b) a pair of outer walls(14,16) positioned at both the sides of said boss(12) so that a fan-shaped empty space is provided between the circular boss(12) and a pair of outer walls(14,16) for mounting a coil, (c) a pair of base plates(18,20) coupling said boss(12) with said outer walls(14,16) at the extreme end of those members so that those members conform substantially with the E-shaped structure, (d) the other extreme end of said boss(12), the outer walls(14,16) and the base plates(18,20) residing on a single plane, (e) each of said outer walls(14,16) being essentially rectangular with the external linear wall and the inner curved wall which is coaxial with the circular boss(12), and the width(d.sub.2) of said external linear wall is larger than the diameter(d.sub.