Patents by Inventor Tadashi Ookatsu

Tadashi Ookatsu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of cleaning wafers or the like
    Patent number: 4972677
    Abstract: Liquid carbon dioxide substantially free of particles is prepared by evaporating liquid carbon dioxide, passing the resulting gaseous carbon dioxide through a suitable filter to remove particles therefrom and cooling the particle-free gas to reliquefy it.
    Type: Grant
    Filed: February 9, 1989
    Date of Patent: November 27, 1990
    Assignee: The BOC Group, Inc.
    Inventors: Kozo Moriya, Tadashi Ookatsu