Abstract: A substrate storing container includes: a container main body; a lid body that is attachable to and detachable from a container main body opening portion and can close the container main body opening portion; and a sealing member that closes the container main body opening portion together with the lid body, in which airtightness of the substrate storing space is enhanced so that 50% or more of a gas supplied to a substrate storing space can be discharged from an exhaust filter portion in a case in which a supply amount of a gas supplied from an outer space of the container main body to the substrate storing space through a gas supply filter portion is 22 liters per minute or less.

Abstract: A housing accommodates: a valve body capable of moving between a closing position and an opening position in an outer opening portion, the closing position closing the outer opening portion and the opening position opening the outer opening portion; a biased member having a tubular shape and connected to the valve body, the biased member supported by the housing so as to be movable in the housing and guiding the movement of the valve body so as to move integrally with the valve body; and a biasing member biasing the biased member so that the valve body moves to the closing position.

Abstract: A substrate storing container includes: a container main body; a lid body that is attachable to and detachable from a container main body opening portion and can close the container main body opening portion; and a sealing member that closes the container main body opening portion together with the lid body, in which airtightness of the substrate storing space is enhanced so that 50% or more of a gas supplied to a substrate storing space can be discharged from an exhaust filter portion in a case in which a supply amount of a gas supplied from an outer space of the container main body to the substrate storing space through a gas supply filter portion is 22 liters per minute or less.

Abstract: A seal member capable of maintaining, increasing, and stabilizing sealability by preventing it from being deteriorated with time and interposed between a container body and a cover body to seal therebetween. The seal member comprises an endless part fitted to a fitting groove formed in the cover body and a projected piece formed extendedly from the endless part so that its tip part is brought into contact with the container body to seal a contact portion between the container body and the cover body. The projected piece comprises a contact piece brought into contact with the contact surfaces of the container body and the cover body to seal therebetween. The contact piece is formed of two sheets of lip parts of fork shape in cross section.

Abstract: A lid unit for closing a container body of a thin-plate supporting container for use in storing semiconductor wafers therein is provided. A simplified attaching-and-detaching mechanism of the lid unit includes a locking member extending from the main body engageable with a receiving device on the container body; a guiding member that reaches the receiving device in a state in which the main body fits lightly in the container body, and guides the locking member into the receiving device; and a feed member that rotates by engaging with the locking member, extends the locking member from the main body to be engageable with the receiving device on the container body. A rotation region of the feed member is divided into a rotation region for engaging the locking member with the receiving device on the container body and fixing the lid unit to the container body, and a rotation region for further rotating the feed member and fixing the feed member with the lid unit fixed to the container body.