Patents by Inventor Tadayoshi Yoshikawa
Tadayoshi Yoshikawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11521885Abstract: A substrate fixing device includes a base plate including therein a gas supply section, and an electrostatic chuck provided on the base plate. The electrostatic chuck includes a base having a mounting surface on which a target to be held by electrostatic attraction is mounted, an insertion hole, penetrating the base, having an inner surface that defines the insertion hole and is threaded to form a female thread, and a screw member, having an outer surface that is threaded to form a male thread, and inserted into the insertion hole to assume a mated state in which the male thread mates with the female thread. A gas from the gas supply section is supplied to the mounting surface via the screw member.Type: GrantFiled: March 9, 2020Date of Patent: December 6, 2022Assignee: SHINKO ELECTRIC INDUSTRIES CO., LTD.Inventors: Tadayoshi Yoshikawa, Miki Saito, Takahiko Suzuki, Shuzo Aoki
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Publication number: 20200294838Abstract: A substrate fixing device includes a base plate including therein a gas supply section, and an electrostatic chuck provided on the base plate. The electrostatic chuck includes a base having a mounting surface on which a target to be held by electrostatic attraction is mounted, an insertion hole, penetrating the base, having an inner surface that defines the insertion hole and is threaded to foLm a female thread, and a screw member, having an outer surface that is threaded to form a male thread, and inserted into the insertion hole to assume a mated state in which the male thread mates with the female thread. A gas from the gas supply section is supplied to the mounting surface via the screw member.Type: ApplicationFiled: March 9, 2020Publication date: September 17, 2020Inventors: Tadayoshi YOSHIKAWA, Miki SAITO, Takahiko SUZUKI, Shuzo AOKI
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Patent number: 9837297Abstract: A tray includes a support base having both a first face on which a clamp object is placed and a second face opposite the first face, an upper electrode embedded in the support base and situated toward the first face, a lower electrode embedded in the support base and situated further toward the second face than the upper electrode is, and one or more interconnect lines configured to provide an electrical connection between the upper electrode and the lower electrode.Type: GrantFiled: June 8, 2015Date of Patent: December 5, 2017Assignee: SHINKO ELECTRIC INDUSTRIES CO., LTD.Inventors: Koki Tamagawa, Norio Shiraiwa, Tadayoshi Yoshikawa, Naoto Watanabe, Miki Saito
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Publication number: 20150371885Abstract: A tray includes a support base having both a first face on which a clamp object is placed and a second face opposite the first face, an upper electrode embedded in the support base and situated toward the first face, a lower electrode embedded in the support base and situated further toward the second face than the upper electrode is, and one or more interconnect lines configured to provide an electrical connection between the upper electrode and the lower electrode.Type: ApplicationFiled: June 8, 2015Publication date: December 24, 2015Inventors: Koki TAMAGAWA, Norio SHIRAIWA, Tadayoshi YOSHIKAWA, Naoto WATANABE, Miki SAITO
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Patent number: 9120704Abstract: A dielectric layer for an electrostatic chuck is formed of a ceramic material having a first phase including aluminum oxide and a second phase including composite carbonitride (Ti, Me)(C, N) that contains titanium as fine grains. The Me represents a transition element and metals of Group 4 to Group 6 such as Mo and W. The ceramic material that includes the second phase by 0.05 vol % to 2.5 vol % has a volume resistivity value of about 108 to 1013 (?·cm) necessary for a Johnsen-Rahbek type electrostatic chuck.Type: GrantFiled: October 15, 2013Date of Patent: September 1, 2015Assignees: Nippon Tungsten Co., Ltd., Shinko Electric Industries Co., Ltd., Trek Holding Co., Ltd., Japan Fine Ceramics CenterInventors: Kouta Tsutsumi, Mitsuyoshi Nagano, Koki Tamagawa, Norio Shiraiwa, Tadayoshi Yoshikawa, Miki Saito, Toshio Uehara, Hideaki Matsubara, Tetsushi Matsuda
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Publication number: 20140103612Abstract: A dielectric layer for an electrostatic chuck is formed of a ceramic material having a first phase including aluminum oxide and a second phase including composite carbonitride (Ti, Me)(C, N) that contains titanium as fine grains. The Me represents a transition element and metals of Group 4 to Group 6 such as Mo and W. The ceramic material that includes the second phase by 0.05 vol % to 2.5 vol % has a volume resistivity value of about 108 to 1013 (?·cm) necessary for a Johnsen-Rahbek type electrostatic chuck.Type: ApplicationFiled: October 15, 2013Publication date: April 17, 2014Applicants: NIPPON TUNGSTEN CO., LTD., JAPAN FINE CERAMICS CENTER, TREK HOLDING CO., LTD., SHINKO ELECTRIC INDUSTRIES CO., LTD.Inventors: Kouta Tsutsumi, Mitsuyoshi Nagano, Koki Tamagawa, Norio Shiraiwa, Tadayoshi Yoshikawa, Miki Saito, Toshio Uehara, Hideaki Matsubara, Tetsushi Matsuda
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Patent number: 8686743Abstract: A substrate including a sensor unit, wherein the sensor unit includes a coil wound at least once arranged on the surface of the sensor or embedded within and near the surface thereof. With such an arrangement, an electric current that corresponds to information with respect to the substrate (e.g., the temperature of the substrate or the amount of charge stored in the substrate) flows through the coil.Type: GrantFiled: November 19, 2009Date of Patent: April 1, 2014Assignees: Philtech Inc., Shinko Electric Industries Co., Ltd.Inventors: Yuji Furumura, Naomi Mura, Koki Tamagawa, Tadayoshi Yoshikawa, Hiroshi Yonekura
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Patent number: 8505928Abstract: A substrate temperature control fixing apparatus comprises an electrostatic chuck which includes a base body and adsorbs and holds an adsorbing target mounted on one of surfaces of the base body, a base plate which supports the electrostatic chuck, and a bank portion provided on an outer periphery of one of surfaces of the base plate which is opposed to the other of the surfaces of the base body.Type: GrantFiled: December 21, 2009Date of Patent: August 13, 2013Assignee: Shinko Electric Industries Co., Ltd.Inventors: Miki Saito, Tadayoshi Yoshikawa, Koki Tamagawa
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Patent number: 8441772Abstract: An electrostatic chuck includes a metal base member and an insulating substrate having an opposite surface to an attraction surface joined onto the base member via an adhesive layer. In the substrate, an electrode layer to which a direct current voltage for attraction is applied is embedded in a portion of the substrate, close to the attraction surface. In addition, a plurality of independent RF electrode layers to which different radio frequencies for plasma control are fed, respectively, are embedded in portions of the substrate, at an opposite side of the first electrode layer to the attraction surface. The RF electrode layers are arranged separately in different layers which are not on an identical plane in such a manner as to partially overlap each other in a plan view.Type: GrantFiled: October 22, 2010Date of Patent: May 14, 2013Assignee: Shinko Electric Industries Co., Ltd.Inventors: Tadayoshi Yoshikawa, Koki Tamagawa, Naoto Watanabe
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Publication number: 20110096461Abstract: An electrostatic chuck includes a metal base member and an insulating substrate having an opposite surface to an attraction surface joined onto the base member via an adhesive layer. In the substrate, an electrode layer to which a direct current voltage for attraction is applied is embedded in a portion of the substrate, close to the attraction surface. In addition, a plurality of independent RF electrode layers to which different radio frequencies for plasma control are fed, respectively, are embedded in portions of the substrate, at an opposite side of the first electrode layer to the attraction surface. The RF electrode layers are arranged separately in different layers which are not on an identical plane in such a manner as to partially overlap each other in a plan view.Type: ApplicationFiled: October 22, 2010Publication date: April 28, 2011Applicant: SHINKO ELECTRIC INDUSTRIES CO., LTD.Inventors: Tadayoshi YOSHIKAWA, Koki Tamagawa, Naoto Watanabe
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Publication number: 20100156055Abstract: A substrate temperature control fixing apparatus comprises an electrostatic chuck which includes a base body and adsorbs and holds an adsorbing target mounted on one of surfaces of the base body, a base plate which supports the electrostatic chuck, and a bank portion provided on an outer periphery of one of surfaces of the base plate which is opposed to the other of the surfaces of the base body.Type: ApplicationFiled: December 21, 2009Publication date: June 24, 2010Applicant: Shinko Electric Industries Co., Ltd.Inventors: Miki Saito, Tadayoshi Yoshikawa, Koki Tamagawa
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Publication number: 20100134122Abstract: A substrate including a sensor unit, wherein the sensor unit includes a coil wound at least once arranged on the surface of the sensor or embedded within and near the surface thereof. With such an arrangement, an electric current that corresponds to information with respect to the substrate flows through the coil.Type: ApplicationFiled: November 19, 2009Publication date: June 3, 2010Applicants: Philtech Inc., Shinko Electric Industries Co., Ltd.Inventors: Yuji Furumura, Naomi Mura, Koki Tamagawa, Tadayoshi Yoshikawa, Hiroshi Yonekura
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Publication number: 20090168292Abstract: There is provided an electrostatic chuck for adsorbing and holding an adsorption object placed on an upper surface of a base body having an electrostatic electrode embedded therein and for filling inert gas of which a pressure is adjusted into a space formed between the upper surface of the base body and a lower surface of the adsorption object, wherein the base body includes a gas discharge portion embedded therein so as to discharge the inert gas to the space and a gas path embedded therein so as to introduce the inert gas into the gas discharge portion while communicating with the gas discharge portion.Type: ApplicationFiled: December 15, 2008Publication date: July 2, 2009Applicant: SHINKO ELECTRIC INDUSTRIES CO., LTD.Inventors: Naoto Watanabe, Tadayoshi Yoshikawa
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Publication number: 20090059461Abstract: An electrostatic chuck of the invention includes a base portion; a heat insulating layer bonded onto the base portion; and a chuck function portion bonded on the heat insulating layer and composed by providing a heater electrode and an electrostatic chuck (ESC) electrode in a ceramic substrate portion. Adhesive layers are respectively provided on the both surface sides of the heat insulating layer. In the case where the base portion and the chuck function portion are bonded together with high adhesion strength, openings are formed in the heat insulating layer and are filled with the adhesive layers.Type: ApplicationFiled: July 11, 2008Publication date: March 5, 2009Applicant: SHINKO ELECTRIC INDUSTRIES CO., LTD.Inventors: Hiroshi Yonekura, Tadayoshi Yoshikawa
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Patent number: 4230762Abstract: An asphalt water-proofing material comprising a core impregnated with petroleum asphalt. The core is made of composite material including a non-woven fabric layer formed of long filaments of synthetic resin arranged in random fashion and a woven or knitted fabric layer. The non-woven fabric and woven or knitted fabric layers are connected together by needle-punching whereby the long filaments of the non-woven fabric layer are forced into the woven or knitted fabric layer to integrally connect these layers to form said core.Type: GrantFiled: July 20, 1979Date of Patent: October 28, 1980Assignees: Mitsui Petrochemical Industries Ltd., Mitsuboshi Sangyo Co., Ltd.Inventors: Hajime Iwasaki, Kuninori Mizuta, Yoshinori Kobayashi, Tadayoshi Yoshikawa, Kyouzi Muraoka