Abstract: A shock absorbing apparatus in a positioning apparatus including a stage apparatus is disclosed. The positioning apparatus includes a main body apparatus for mounting the stage apparatus thereto, and a chamber for maintaining a region, in which the stage apparatus is disposed, under a condition of vacuum or purged ambience. The shock absorbing apparatus includes a shock absorber provided at a stroke end of the stage apparatus, and a support member provided separately from the stage apparatus, to which the shock absorber is fixed. In the shock absorbing apparatus of the present invention, the shock absorbing apparatus is fixed to the support member provided separately from the stage apparatus including a driving system, and accordingly an increase in size of the stage apparatus can be prevented, and high-speed and highly-precise positioning of an object to be positioned can be performed in a non-atmospheric ambience.

Abstract: A positioning method that includes a step of moving a stage apparatus for supporting a workpiece or an object to be measured from an auxiliary mount to a positioning mount using a rolling guide extending from the positioning mount onto the auxiliary mount, a step of lifting the stage apparatus moved to the positioning mount using a lifting unit to extract the rolling guide, and a step of lowering the stage apparatus onto the positioning mount, from which the rolling guide is extracted, to cause the stage apparatus to abut a reference member and to position the stage apparatus, while hydrostatically supporting the stage apparatus by a hydrostatic bearing unit. A positioning apparatus for performing a positioning method is also set forth.

Abstract: A positioning method that includes a step of moving a stage apparatus for supporting a workpiece or an object to be measured from an auxiliary mount to a positioning mount using a rolling guide extending from the positioning mount onto the auxiliary mount, a step of lifting the stage apparatus moved to the positioning mount using a lifting unit to extract the rolling guide, and a step of lowering the stage apparatus onto the positioning mount, from which the rolling guide is extracted, to cause the stage apparatus to abut a reference member and to position the stage apparatus, while hydrostatically supporting the stage apparatus by a hydrostatic bearing unit. A positioning apparatus for performing a positioning method is also set forth.

Abstract: To realize the temperature control of the sample-setting portion and enable to perform exposure or inspection of samples accurately while preventing the generation of dust, deterioration of the degree of vacuum and contamination in a vacuum atmosphere.

Abstract: A shock absorbing apparatus in a positioning apparatus including a stage apparatus is disclosed. The positioning apparatus includes a main body apparatus for mounting the stage apparatus thereto, and a chamber for maintaining a region, in which the stage apparatus is disposed, under a condition of vacuum or purged ambience. The shock absorbing apparatus includes a shock absorber provided at a stroke end of the stage apparatus, and a support member provided separately from the stage apparatus, to which the shock absorber is fixed. In the shock absorbing apparatus of the present invention, the shock absorbing apparatus is fixed to the support member provided separately from the stage apparatus including a driving system, and accordingly an increase in size of the stage apparatus can be prevented, and high-speed and highly-precise positioning of an object to be positioned can be performed in a non-atmospheric ambience.

Abstract: A stage device includes a table having a reference plane parallel to first and second directions; a driving body movable along the first direction; a moving body movable along the second direction with respect to the driving body; a static pressure bearing provided on the moving body; an exhaust groove provided surrounding the static pressure bearing; and a mechanism for delivering a gas of the static pressure bearing recovered by the exhaust groove between the moving body and the driving body. The adverse affects of piping on the moving body can be reduced and it is possible to position the moving body with high precision.

Abstract: A stage device includes a table having a reference plane parallel to first and second directions; a driving body movable along the first direction; a moving body movable along the second direction with respect to the driving body; a static pressure bearing provided on the moving body; an exhaust groove provided surrounding the static pressure bearing; and a mechanism for delivering a gas of the static pressure bearing recovered by the exhaust groove between the moving body and the driving body. The adverse affects of piping on the moving body can be reduced and it is possible to position the moving body with high precision.

Abstract: A stage system includes a first stage movable along a reference plane, containing a vertical direction, and in the vertical direction or in a first direction close to the vertical direction, a second stage movable in a second direction intersecting with the first direction and relative to the first stage, a first driving mechanism for moving the first stage in the first direction, a second driving mechanism for moving the second stage in the second direction, a countermass movable in the first direction, and a third driving mechanism for moving the countermass in a direction opposite to the first direction.

Abstract: A linear driving device includes a hydrostatic gas bearing, a shaft supported by the bearing, and a voice-coil motor for driving the shaft in a direction of movement. The bearing and the shaft are disposed within the voice-coil motor. The device further includes a locking mechanism for constraining the movement of the shaft in its direction of movement. In addition, the voice-coil motor includes a coil assembly having a coil. The coil assembly forms a closed space surrounded by the coil. The coil assembly has a plurality of exhaust holes therein communicating with the outside from the closed space.

Abstract: A positioning device, includes a first positioning portion for moving an article in a direction substantially perpendicular to a predetermined plane and/or in a direction inclined with respect to the predetermined plane; a second positioning portion for moving the article in a direction substantially parallel to the predetermined plane, wherein the first positioning portion is mounted on the second positioning portion; a base member on which the second positioning portion is mounted; and a position detecting system for controlling movement of the article through the first positioning portion, the position detecting system being operable to measure displacement with respect to the surface of the base member.

Abstract: A linear-motion driving device includes a movable shaft, a gas bearing for supporting the movable shaft, a housing for supporting the gas bearing, and a motor having a voice coil for displacing the movable shaft. The bearing housing is disposed inside the voice coil.

Abstract: Disclosed herein is a comparator circuit used in a system for controlling, in accordance with an air-fuel ratio signal from an O.sub.2 sensor arranged in an exhaust system of an internal combustion engine, the air-fuel ratio of the exhaust gas. The comparator has two inputs, one of which receives a signal having a phase which is the same as a signal from the O.sub.2 sensor, the other of which receives a delayed phase signal. The output of the comparator operates to provide, in accordance with the voltage level difference between the inputs, two deviation signals, one of which indicates that air-fuel ratio has deviated to the rich side of the air-fuel ratio the other of which indicates that the air-fuel ratio has deviated to the lean side of the air-fuel ratio.