Abstract: Methods of depositing a silicon oxide film are disclosed. One embodiment is a plasma enhanced atomic layer deposition (PEALD) process that includes supplying a vapor phase silicon precursor, such as a diaminosilane compound, to a substrate, and supplying oxygen plasma to the substrate. Another embodiment is a pulsed hybrid method between atomic layer deposition (ALD) and chemical vapor deposition (CVD). In the other embodiment, a vapor phase silicon precursor, such as a diaminosilane compound, is supplied to a substrate while ozone gas is continuously or discontinuously supplied to the substrate.

Abstract: The present invention relates to bisphenyl-2,3,5,6-tetrafluoro-4-trifluoromethylphenylphosphine oxide compounds and synthesis thereof, more particularly to novel bisphenyl-2,3,5,6-tetrafluoro-4-trifluoromethylphenylphosphine oxide compounds having both a perfluorinated benzene substituent and a phosphine oxide moiety. Compounds of the invention can be useful as a monomer for preparing polyimides having a low dielectric constant and a superior adhesion while maintaining the superior thermal and mechanical properties of polyimides themselves, and their synthesis thereof.

Abstract: A biometric identification apparatus and method using bio signals and an artificial neural network, are provided. The biometric identification apparatus includes: a periodic signal extraction unit which extracts one or more periodic signals from an input bio signal; a template calculation unit which calculates a template value using the extracted periodic signals; a template storage unit which stores a plurality of template values corresponding to a plurality of living bodies; and a reading unit which reads the template value that is most approximate to the template value calculated by the template calculation unit from the template storage unit. Accordingly, it is possible to identify a living body by taking into consideration all of the characteristics of bio signals detected from the living body.

Abstract: A biometric apparatus and a method thereof using bio signals are provided. The apparatus includes an ADC, a periodic signal extractor, a template storing portion, a comparator. The ADC performs sampling of an input bio signal to convert the sampled bio signal into a digital signal. The periodic signal extractor extracts the periodic signals from the digital signal. The template storing portion registers a plurality of users and stores periodic signals for the respective registered users in a form of templates. The comparator computes similarity between the periodic signals outputted from the periodic signal extractor and the respective templates to select a template whose similarity is greatest and recognizes a user that corresponds to the selected template as a user who corresponds to the input bio signal.

Abstract: The present invention relates to bisphenyl-2,3,5,6-tetrafluoro-4-trifluoromethylphenylphosphine oxide compounds and synthesis thereof, more particularly to novel bisphenyl-2,3,5,6-tetrafluoro-4-trifluoromethylphenylphosphine oxide compounds having both a perfluorinated benzene substituent and a phosphine oxide moiety. Compounds of the invention can be useful as a monomer for preparing polyimides having a low dielectric constant and a superior adhesion while maintaining the superior thermal and mechanical properties of polyimides themselves, and their synthesis thereof.

Abstract: The present invention relates to fluorine-containing triarylphosphine oxide derivatives and preparing method thereof. Particularly, the present invention relates to both fluorine- and phosphine oxide-containing triarylphosphine oxide derivatives which can be utilized in preparing polyimides having excellent adhesion, fire retardancy and low dielectric constant as well as superior thermal stability and mechanical properties, and preparing method thereof.

Abstract: This invention relates to the surface modified silica by plasma polymerization coating, plasma polymerization method and plasma polymerization devices. Silica, active ingredients of EMC, is coated by plasma polymerization coating in order to enhance the adhesion of silica to epoxy resin and thus to improve the reliability of EMC. The monomers for the plasma polymerization coating were 1,3-diaminopropane, allylamine, pyrrole, 1,2-epoxy-5-hexene, allylmercaptan and allylalcohol, and the surface modified silica was utilized to prepare EMC for electronic devices. The plasma polymerization coating, which is known to be environment-friendly method, provided excellent flexural properties of EMC compared to the conventionally prepared EMC.

Abstract: Disclosed is a method for manufacturing a hetero junction bipolar transistor capable of forming a ledge by using a low-priced contact aligner and in a selective wet etching manner, without having any expensive stepper and dry etching and forming a ballasting resistor, without having an additional NiCr thin film, whereby the manufacturing processes thereof can be embodied in simple and easy manners, thereby improving productivity and an economical efficiency.

Abstract: The present invention relates to fluorine-containing 3,6-di(3′,5′-bis(trifluoromethyl)benzene)pyromellitic dianhydride as a monomer which can be used in preparing polyimides with high glass transition temperature, low dielectric constant and excellent processability, and preparing method thereof.

Abstract: The present invention relates to fluorine-containing 3,6-di(3′,5′-bis(trifluoromethyl)benzene)pyromellitic dianhydride as a monomer which can be used in preparing polyimides with high glass transition temperature, low dielectric constant and excellent processability, and preparing method thereof.

Abstract: The present invention relates to fluorine-containing triarylphosphine oxide derivatives and preparing method thereof. Particularly, the present invention relates to both fluorine- and phosphine oxide-containing triarylphosphine oxide derivatives which can be utilized in preparing polyimides having excellent adhesion, fire retardancy and low dielectric constant as well as superior thermal stability and mechanical properties, and preparing method thereof.

Abstract: The invention relates to triarylphosphine oxide derivatives containing fluorine substituents that are useful as a monomer in preparation of polymers with improved properties such as chemical resistance and electrical insulating property as well as adhesiveness and flame retardancy. The triarylphosphine oxide derivatives containing fluorine substituents are represented by the chemical formula 1: wherein R1 and R2 are independently a fluorine-substituted alkyl group; and X is hydrogen, a nitro group, or an amine group.