Abstract: Disclosed are a substrate processing apparatus and a substrate processing method. The substrate processing apparatus includes a chamber including a processing space defined therein, a substrate support unit configured to support a substrate in the processing space, a microwave unit configured to supply microwaves to the processing space, a window member disposed below the microwave unit and configured to transmit the microwaves supplied from the microwave unit, a heat transfer plate disposed in the processing space so as to be spaced a predetermined distance from the window member and configured to be heated by the microwaves supplied to the processing space and to transfer heat to the substrate, and a controller configured to control the microwave unit.

Abstract: One embodiment of the present invention provides an intersection point pattern recognition system using sensor data of a mobile robot, comprising: a mobile robot that autonomously drives by using sensor data received from a sensor unit and an intersection point pattern recognition model provided by a management server; and the management server that receives usage environment information of the mobile robot and generates the intersection point pattern recognition model of the mobile robot to provide the intersection pattern recognition model to the mobile robot, wherein the management server comprises: a map generation unit for receiving the usage environment information of the mobile robot and generating a route map of the mobile robot on the basis of the usage environment information; a normalization unit for generating a virtual map by normalizing the route map according to a preset rule; and a learning unit for generating the intersection point pattern recognition model by using the virtual map and the se

Abstract: One embodiment of the present invention provides an intersection point pattern recognition system using sensor data of a mobile robot, comprising: a mobile robot that autonomously drives by using sensor data received from a sensor unit and an intersection point pattern recognition model provided by a management server; and the management server that receives usage environment information of the mobile robot and generates the intersection point pattern recognition model of the mobile robot to provide the intersection pattern recognition model to the mobile robot, wherein the management server comprises: a map generation unit for receiving the usage environment information of the mobile robot and generating a route map of the mobile robot on the basis of the usage environment information; a normalization unit for generating a virtual map by normalizing the route map according to a preset rule; and a learning unit for generating the intersection point pattern recognition model by using the virtual map and the se

Abstract: A series elastic actuator includes a first body, a motor, a pulley, a second body, a wire, a first adjuster, a second adjuster, a first spring, and a second spring. The wire is curved around a seat portion of the pulley, a first extending portion of the wire and the first adjuster are elastically supported with respect to the second body by the first spring, and the second extending portion of the wire and the second adjuster are elastically supported with respect to the second body by the second spring. When an external load is applied to the second body and relative rotation is generated between the pulley and the second body, a moment arm by the load is constant and the external load can be measured on the basis of the measured relative rotation angle and the spring constants of the first spring and the second spring.

Abstract: A tantalum capacitor includes: a tantalum body including tantalum, and having a tantalum wire in which a distance from a lower surface of the tantalum body is closer than a distance from an upper surface of the tantalum body; an insulating member on which the tantalum body is disposed; an encapsulation portion; an anode terminal including an upper anode and connected to the tantalum wire, a lower anode pattern, and an anode connection portion connecting the upper anode pattern and the lower anode pattern; and a cathode terminal including an upper cathode pattern and connected to the tantalum body, a lower cathode pattern disposed on a lower surface of the insulating member to be spaced apart from the lower anode pattern, and a cathode connection portion connecting the upper cathode pattern and the lower cathode pattern.

Abstract: A series elastic actuator includes a first body, a motor, a pulley, a second body, a wire, a first adjuster, a second adjuster, a first spring, and a second spring. The wire is curved around a seat portion of the pulley, a first extending portion of the wire and the first adjuster are elastically supported with respect to the second body by the first spring, and the second extending portion of the wire and the second adjuster are elastically supported with respect to the second body by the second spring. When an external load is applied to the second body and relative rotation is generated between the pulley and the second body, a moment arm by the load is constant and the external load can be measured on the basis of the measured relative rotation angle and the spring constants of the first spring and the second spring.

Abstract: A tantalum capacitor includes: a tantalum body including tantalum, and having a tantalum wire in which a distance from a lower surface of the tantalum body is closer than a distance from an upper surface of the tantalum body; an insulating member on which the tantalum body is disposed; an encapsulation portion; an anode terminal including an upper anode and connected to the tantalum wire, a lower anode pattern, and an anode connection portion connecting the upper anode pattern and the lower anode pattern; and a cathode terminal including an upper cathode pattern and connected to the tantalum body, a lower cathode pattern disposed on a lower surface of the insulating member to be spaced apart from the lower anode pattern, and a cathode connection portion connecting the upper cathode pattern and the lower cathode pattern.

Abstract: Provided are an omnidirectional moving robot device, and a system and method for object conveyance using a plurality of moving robot devices. The omnidirectional moving robot device includes a sensor, a traveling unit including an omnidirectional wheel disposed in a housing, and a control unit configured to transmit a traveling command signal to the traveling unit by using data measured by the sensor.

Abstract: Disclosed are a shunt resistor and a shunt resistor assembly in which measurement terminals to measure voltage are disposed as close as possible to a resistor element so as to reduce a measurement error, and mechanical and electrical connection is excellent.

Abstract: Provided are an upper limb rehabilitation robot including: a sensing member that is mounted and fixed to an upper limb of a user and captures motion of the upper limb according to a movement intention of the user; a motion control unit that is electrically connected to the sensing member, calculates a movement direction, a distance or angle, a speed, and an auxiliary force (target value) needed for the upper limb to move, intended by the upper limb, based on the motion captured by using the sensing member, and generates and outputs a control signal according to the calculated movement direction, distance or angle, speed, and auxiliary force (target value); and a multi-joint robot, to an end of an arm of which the sensing member is coupled, wherein the multi-joint robot guides movement of the upper limb fixed to the sensing member to selectively move or rotate toward a food tray placed at a designated position of a table along an X-axis, a Y-axis, or a Z-axis and provides an assistance force to the upper limb.

Abstract: Disclosed are a manufacturing method of a shunt resistor and a manufacturing method, in which a resistor element and connection pieces may be bonded through laser or electron beam welding so as to prevent welding distortion as much as possible, and measurement terminals may be manufactured by a simple pressing and bending process.

Abstract: Provided are an omnidirectional moving robot device, and a system and method for object conveyance using a plurality of moving robot devices. The omnidirectional moving robot device includes a sensor, a traveling unit including an omnidirectional wheel disposed in a housing, and a control unit configured to transmit a traveling command signal to the traveling unit by using data measured by the sensor.

Abstract: A complex protection device for blocking an abnormal state of current and voltage is disclosed. In the complex protection device, a resistive element is configured in the form of a structure and thus the resistive element has enhanced durability and surface mounting technology suitable for automation may be utilized, and a plurality of resistive elements is configured in various resistances and sizes to be optimally designed for product characteristics.

Abstract: A display apparatus including a display, a communication unit configured to communicate with a plurality of terminal devices and receive image contents from the plurality of terminal devices, a storage configured to store the received image contents, and a processor configured to classify the stored image content according to a predetermined criterion and display the image contents through the display.

Abstract: A complex protection device for blocking an abnormal state of current and voltage is disclosed. In the complex protection device, a resistive element is configured in the form of a structure, and thus, the resistive element has enhanced durability, surface mounting technology suitable for automation may be used, and an insulation distance may be sufficiently secured when a fusible element is blown out.

Abstract: A complex protection device for blocking an abnormal state of current and voltage is disclosed. In the complex protection device, a resistive element is configured in the form of a structure and thus the resistive element has enhanced durability and surface mounting technology suitable for automation may be utilized, and a plurality of resistive elements is configured in various resistances and sizes to be optimally designed for product characteristics.

Abstract: Provided is a torque measuring apparatus using magnetic bodies, the torque measuring apparatus including: an input link whose one end is connected to a driver and rotated in one direction by the driver; a first displacement sensor disposed at the other end of the input link, and controlling rotation displacement of the input link and the driver; a plurality of first magnetic bodies connected to the input link via a connection member and rotating in the one direction; a plurality of second magnetic bodies disposed between the plurality of first magnetic bodies; an output link supporting the plurality of second magnetic bodies and rotated by the pluralities of first and second magnetic bodies, wherein the plurality of second magnetic bodies are disposed inside the output link; and a second displacement sensor closely disposed to one surface of the output link and measuring rotation displacement of the output link.

Abstract: Provided are an upper limb rehabilitation robot including: a sensing member that is mounted and fixed to an upper limb of a user and captures motion of the upper limb according to a movement intention of the user; a motion control unit that is electrically connected to the sensing member, calculates a movement direction, a distance or angle, a speed, and an auxiliary force (target value) needed for the upper limb to move, intended by the upper limb, based on the motion captured by using the sensing member, and generates and outputs a control signal according to the calculated movement direction, distance or angle, speed, and auxiliary force (target value); and a multi-joint robot, to an end of an arm of which the sensing member is coupled, wherein the multi-joint robot guides movement of the upper limb fixed to the sensing member to selectively move or rotate toward a food tray placed at a designated position of a table along an X-axis, a Y-axis, or a Z-axis and provides an assistance force to the upper limb.

Abstract: The present invention provides a solid electrolytic condenser including a condenser element with anode polarity; an anode wire with one side inserted inside the condenser element and the other side projected outside the condenser element; and an insulating layer formed by coating one surface of the condenser element and an exposed region of the anode wire adjacent to the one surface of the condenser element with a liquid insulating material through a non-contact scattering method and an apparatus and a method for forming the insulating layer of the solid electrolytic condenser.

Abstract: The present invention provides a solid electrolytic condenser including a condenser element with anode polarity; an anode wire with one side inserted inside the condenser element and the other side projected outside the condenser element; and an insulating layer formed by coating one surface of the condenser element and an exposed region of the anode wire adjacent to the one surface of the condenser element with a liquid insulating material through a non-contact scattering method and an apparatus and a method for forming the insulating layer of the solid electrolytic condenser.