Abstract: A transport apparatus includes: a vehicle; a housing connected to the vehicle and forming an internal space with an open bottom; a hand unit provided to be movable in an up-down direction, in the housing, and to grip and upgrip a transport object; and a slide unit separated from the hand unit, in the housing, and moving horizontally in a direction where the hand unit is disposed, wherein the slide unit includes: a base plate provided in the internal space of the housing; a slide plate sliding from the base plate in the direction where the hand unit is disposed and seating the transport object; and a drive module provided on the base plate, and sliding the slide plate so that the slide plate protrudes from the base plate.

Abstract: Disclosed is an apparatus for transferring an article, the apparatus including: a vehicle moving along a moving rail installed on a ceiling; a main body connected to the vehicle and providing an interior space in which an article is located; a hoist module provided in the main body, and for hoisting a belt by winding or unwinding the belt; a hand unit fixed at one end of the belt and for gripping the article; and a drop preventing member provided in the main body, and for preventing the article from dropping during moving of the vehicle, in which the drop preventing member includes support pins provided at different heights depending on types of article.

Abstract: A cleaning device for a substrate transfer device comprises a traveling unit configured to travel along a rail having first and second areas, a rail unit including the rail and a rail structure disposed on the rail, and a rinsing unit including a suction part disposed on the rail and that rotates about a suction nozzle. When the rinsing unit is placed in contact with the rail structure, the suction part rotates about the suction nozzle.